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Broadband piezoelectric type MEMS vibration energy collector

A vibration energy harvesting, piezoelectric technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problem of high resonance frequency, narrow operating frequency range, output problems such as low energy, to achieve the effect of high output energy, wide operating frequency bandwidth, and increased output energy

Inactive Publication Date: 2016-01-20
苏州工业园区纳米产业技术研究院有限公司
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Problems solved by technology

[0005] In order to solve the problems of high resonance frequency, low output energy and narrow operating frequency range of the existing MEMS vibration energy harvester, the present invention proposes a broadband piezoelectric MEMS vibration energy harvester, which is based on the cantilever beam-mass basic structure Multi-chip array integrated device of chip unit

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  • Broadband piezoelectric type MEMS vibration energy collector
  • Broadband piezoelectric type MEMS vibration energy collector
  • Broadband piezoelectric type MEMS vibration energy collector

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Embodiment Construction

[0019] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0020] see Figure 1 to Figure 3 A broadband piezoelectric MEMS vibration energy harvester is an integrated device in an array of multi-basic chips 20 , including four groups of basic chips 20 fixed on a peripheral substrate 10 . An external wire bonding pad 11 is fixed on the peripheral substrate 10; the basic chip 20 includes a frame 21, a plurality of cantilever beams 22 connected to the inner surface of the frame 21 at one end, and mass blocks 23 supported by the other ends of each cantilever beam 22, each The cantilever beams 22 each include a piezoelectric layer 30, an upper electrode layer 40 covering the upper surface of the piezoelectric layer 30 and disconnected...

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Abstract

The present invention provides a broadband responsive piezoelectric type MEMS vibration energy collector which realizes the conversion from mechanical energy to electric energy by the utilization of the direct piezoelectric effect of a piezoelectric material by converting the environmental vibration energy into electric energy. A cantilever-mass structure easily to resonate with the environment is used as the basis chip, the multi-basis chip array integration improves the total output electric energy of the energy collector, various structure parameters of each basis chip are used for broadening the frequency band range so that the energy collector is applied to various vibration environment. The energy collector has the broadband response capability and broadens working response frequency bands. The multi-basis chip integration has the high output energy. The energy collector has the advantages of self-powered mode, stabilization, sustainability and the like by collecting the environment vibration energy, and would solve the self-powered problem of the application system such as wireless sensor network and the like.

Description

technical field [0001] The invention relates to an energy collection device, in particular to a broadband piezoelectric MEMS vibration energy collection device. Background technique [0002] With the gradual development of wireless sensor network, its application has been popularized from military defense to environmental monitoring, traffic management and other social fields. Sensor network nodes are the basis for building wireless sensor networks, and wireless sensor network nodes have the characteristics of large number, low power consumption, and complex distribution. Traditional wired power supply and battery power supply cannot meet the long-term stable power supply of wireless sensor network nodes. need. Therefore, the new power supply method provides a new idea for solving the long-term stable power supply problem of wireless sensor network nodes. [0003] Energy harvesting technology can convert vibration energy, light energy, radiation energy, heat energy, etc. i...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/18
CPCH02N2/18
Inventor 陈婷婷
Owner 苏州工业园区纳米产业技术研究院有限公司
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