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Aluminum-calcium-barium infrared glass with protective film and preparation method thereof

A technology of infrared glass and protective film, which is applied in the field of aluminum-calcium-barium infrared glass with protective film and its preparation, can solve the problems of large difference in expansion coefficient and insufficient adhesion of the film base, and achieve improved protective performance, simple structure, easy-to-prepare effects

Active Publication Date: 2019-03-05
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But SiO 2 Compared with aluminum-calcium-barium infrared glass, there is a large difference in expansion coefficient, and the film base adhesion is not high enough.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0028] The preparation method of aluminum-calcium-barium infrared glass with a protective film is to ultrasonically clean the infrared glass substrate with acetone and ethanol for 15 minutes, put it into the substrate holder, and vacuumize to 2.0×10 -3 Pa, heated to 300°C, and held for 1 hour; Hall ion source was used to clean the Al-Ca-Barium infrared glass substrate before plating. Prepare the aluminum oxide layer by magnetron sputtering Al target, pass Ar into the vacuum chamber, keep the vacuum degree of the chamber at 0.5 Pa, start the glow, carry out backsputter cleaning on the Al target for 15 minutes; pass O 2 , where Ar / O 2 The ratio is 1:1.5, the indoor vacuum is 1Pa, and the thickness of the obtained alumina layer is 400nm; the silicon dioxide layer is prepared by radio frequency magnetron sputtering Si target, and Ar is introduced into the vacuum chamber to keep the indoor vacuum at 0.5Pa. , Qihui, backsplash cleaning the Si target, the time is 15 minutes. Access...

example 2

[0031] The preparation method of aluminum-calcium-barium infrared glass with a protective film is to ultrasonically clean the infrared glass substrate with acetone and ethanol for 15 minutes, put it into the substrate holder, and vacuumize to 3.0×10 -3 Pa, heated to 250°C, and kept warm for 1.5h; Hall ion source was used to clean the aluminum-calcium-barium infrared glass substrate before plating. Prepare the aluminum oxide layer by radio frequency magnetron sputtering Al target, pass Ar into the vacuum chamber, keep the vacuum degree of the chamber at 0.5 Pa, start the glow, carry out backsputter cleaning on the Al target for 18 minutes; pass O 2 , where Ar / O 2 The ratio is 1:1, the indoor vacuum is 2Pa, and the thickness of the obtained aluminum oxide layer is 650nm; the silicon dioxide layer is prepared by radio frequency magnetron sputtering Si target, and Ar is introduced into the vacuum chamber to keep the indoor vacuum at 1Pa. Start-up, carry out back-splash cleaning o...

example 3

[0034] The preparation method of aluminum-calcium-barium infrared glass with a protective film is to ultrasonically clean the infrared glass substrate with acetone and ethanol for 15 minutes, put it into the substrate holder, and vacuumize to 3.0×10 -3 Pa, heated to 280°C, and kept warm for 1.5h; Hall ion source was used to clean the aluminum-calcium-barium infrared glass substrate before plating. Prepare the aluminum oxide layer by radio frequency magnetron sputtering Al target, pass Ar into the vacuum chamber, keep the vacuum degree of the chamber at 1.5Pa, start the glow, carry out backsputter cleaning on the Al target for 20 minutes; pass O 2 , where Ar / O 2 The ratio is 1:2.5, the indoor vacuum is 5Pa, and the thickness of the obtained aluminum oxide layer is 800nm; the silicon dioxide layer is prepared by radio frequency magnetron sputtering Si target, and Ar is introduced into the vacuum chamber to keep the indoor vacuum at 1Pa. Start-up, carry out back-splash cleaning ...

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Abstract

The invention relates to Al-Ca-Ba infrared glass provided with a protective film and a preparation method of the Al-Ca-Ba infrared glass. The Al-Ca-Ba infrared glass comprises an Al-Ca-Ba infrared glass base layer, an Al2O3 layer deposited in the Al-Ca-Ba infrared glass base layer and a SiO2 layer deposited in the Al2O3 layer. The Al-Ca-Ba infrared glass provided with the protective film is easy to prepare and simple in structure, the attachment performance is improved, and the protective performance of the Al-Ca-Ba infrared glass is enhanced.

Description

technical field [0001] The invention relates to an aluminum-calcium-barium infrared glass and a preparation method thereof, in particular to an aluminum-calcium-barium infrared glass with a protective film and a preparation method thereof. Background technique [0002] Aluminum-calcium-barium glass is an infrared material based on the Al-Ca-Ba system. It has infrared transmission properties similar to sapphire, and has the advantages of wide transmission range and excellent physical and chemical properties. It can be used as an infrared transmission window. Wave infrared photoelectric detection, guidance and other fields are widely used. [0003] As a window material for photoelectric detection, Al-Ca-Barium infrared glass is directly exposed to the atmosphere, while Al-Ca-Barium infrared glass is easily polluted by environmental impurities and moisture, which seriously affects the infrared transmission performance of the glass. In addition, the hardness of the material its...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C17/34
Inventor 金扬利祖成奎韩滨赵华赵慧峰刘永华王衍行陈江何坤
Owner CHINA BUILDING MATERIALS ACAD
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