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Power supply circuit for modified-Siemens-process polycrystalline silicon production device

A technology of production equipment and the Siemens method, applied in the direction of circuit devices, emergency power supply arrangements, electrical components, etc., can solve problems affecting production capacity, high failure rate, and affecting production efficiency, so as to avoid equipment damage, improve production efficiency, and improve reliability. sexual effect

Active Publication Date: 2016-01-27
SICHUAN INJET ELECTRIC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since this starting method is a single starting power supply, when the starting power supply is damaged, the reduction furnace will not be able to start and work, so it has a high failure rate and low equipment reliability, which affects production efficiency and production capacity.

Method used

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  • Power supply circuit for modified-Siemens-process polycrystalline silicon production device
  • Power supply circuit for modified-Siemens-process polycrystalline silicon production device
  • Power supply circuit for modified-Siemens-process polycrystalline silicon production device

Examples

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Effect test

Embodiment 1

[0026] figure 1 Shown is a block diagram of a power supply circuit of an improved Siemens method polysilicon production equipment according to a specific embodiment of the present invention, including a power supply system composed of several reduction furnaces, N starting power supplies, and K standby starting power supplies, wherein the N The start-up power supply of the K sets and the standby start-up power supply of the K sets are connected to the three-phase power transmission circuit at the same time;

[0027] The output terminals of the power supply system are connected to the plurality of reduction furnaces, and each of the K standby starting power supplies is connected to the output terminals of the power supply system through a phase selector. When any of the N starting power supplies When one of the backup starting power supplies is damaged, any one of the backup starting power supplies can adjust its output phase to match the output phase of the damaged starting p...

Embodiment 2

[0039] In order to better illustrate the specific working principle of the circuit of the present invention, image 3 The circuit connection diagram of the 4+1 master-standby switching mode is given, and its connection mode is similar to that of the n+1 master-standby circuit of the present invention, and will not be repeated here.

[0040] Specifically, see image 3 , when HVG1 fails, the standby system starts the phase selector XZG, -Q1 and -Q11 are connected, and the input and output phases of HVG5 are consistent with HVG1, completely replacing HVG1;

[0041] When HVG2 fails, the standby system starts the phase selector XZG, -Q2-Q12 is connected, and the input and output phases of HVG5 are consistent with HVG2, completely replacing HVG2;

[0042] When HVG3 fails, the standby system starts the phase selector XZG, -Q2-Q13 is connected, and the input and output phase of HVG5 is consistent with that of HVG3, completely replacing HVG3;

[0043] When HVG4 fails, the backup syst...

Embodiment 3

[0045] Figure 4 Shown is a schematic block diagram of a power supply circuit of an improved Siemens method polysilicon production equipment with ground detection according to a specific embodiment of the present invention. The content, the difference is only: the electrodes L and H of the reduction furnace are connected together and connected to the protective ground, and the current detection device PT is between the two pole connection points and the protective ground, and is used to detect whether the electrical insulation of the reduction furnace is damaged.

[0046] Further, it also includes a current detection device, one end of the current detection device is grounded, and the other end is connected to any electrode drawn from the reduction furnace to form a loop for detecting whether the electrical insulation of the reduction furnace is damaged.

[0047] Further, the current detection device is a current transformer.

[0048] In order to better illustrate the specific ...

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Abstract

Provided is a power supply circuit for a modified-Siemens-process polycrystalline silicon production device. The power supply circuit comprises a plurality of reducing furnaces, a power supply system formed by N starting power supplies, and K standby starting power supplies. The N starting power supplies and the K standby starting power supplies are connected with a three-phase power transmission circuit at the same time. An output terminal of the power supply system is connected with the plurality of reducing furnaces. Each of the K standby starting power supplies is connected with the output terminal of the power supply system via a phase selector. When any of the N starting power supplies fails, the output phase of any of the standby starting power supplies is adjusted via the phase selector so as to be matched with the output phase of the failed starting power supply which is therefore replaced. In the invention, through the arrangement of the standby starting power supplies, the standby power supplies are used to start the reducing furnaces when the primary power supplies fail, thereby improving the device running stability and increasing the production efficiency and the production capacity as well.

Description

Technical field [0001] The present invention relates to the field of polysilicon production, and in particular to an improved power supply circuit of Siemens polysilicon production equipment. Background technique [0002] In the photovoltaic, electronics, and microelectronics industries, polysilicon is the main raw material. Polycrystalline silicon is high-purity silicon made from metallic silicon as raw material and purified through a series of physical and chemical reactions. Because the improved Siemens process is compatible with the production of electronic-grade and solar-grade polysilicon, it is the preferred process commonly used in polysilicon production due to its mature technology and suitability for industrial production. This production process requires a high-power power supply to heat and control polysilicon rods at a constant temperature. [0003] Polycrystalline silicon is equivalent to a load group with large impedance changes throughout the production proc...

Claims

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Application Information

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IPC IPC(8): H02J9/06H02H3/16C01B33/035
Inventor 谭兵
Owner SICHUAN INJET ELECTRIC CO LTD
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