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Capacitive, ceramic pressure-measuring cell and method for the production thereof

A technology for measuring sensors and pressure, applied in the direction of measuring fluid pressure, measuring device, measuring fluid pressure through electromagnetic components, etc., which can solve the problems of narrow temperature range and temperature lag of pressure measuring sensors

Active Publication Date: 2016-02-03
EHNDRESS KHAUZER GMBKH KO KG
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition to the narrow temperature range of the pressure measuring sensor to be soldered, there is a further disadvantage that the electrodes now have at least two layers with different coefficients of thermal expansion, namely a metallic tantalum layer and a tantalum oxide layer
This will result in a temperature-dependent mechanical stress on the measuring membrane surface, which produces a temperature hysteresis

Method used

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  • Capacitive, ceramic pressure-measuring cell and method for the production thereof
  • Capacitive, ceramic pressure-measuring cell and method for the production thereof
  • Capacitive, ceramic pressure-measuring cell and method for the production thereof

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Embodiment Construction

[0043] figure 1 The pressure measuring sensor 1 shown comprises a measuring membrane 2 comprising high-purity (>99.9%) aluminum oxide, and a matrix 4 which likewise contains aluminum oxide. This base body 4 can have the same purity as the measuring membrane, wherein this is not absolutely necessary, because on the one hand the base body is not in contact with the medium and therefore requires less corrosion resistance, and on the other hand the base body is not as exposed to the environment as the measuring membrane 2 in mechanical stress. The measuring membrane is pressure-bonded to the base body along a circumferential joint 6 with an active solder containing Zr—Ni—Ti, so that a pressure chamber is formed between the measuring membrane 2 and the base body 4 .

[0044]In order to detect the pressure-dependent deformation of the measuring membrane, the pressure measuring sensor 1 comprises a differential capacitor, which is formed by a membrane electrode 8 arranged on the mea...

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Abstract

The invention relates to a pressure-measuring cell (1) having a ceramic measuring membrane (2) and a ceramic counter body (4), wherein the measuring membrane (2) is joined to the counter body (4) in such a way that a pressure chamber is formed between the measuring membrane and the counter body, wherein the pressure-measuring cell (1) also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane (2), which capacitive transducer has at least one membrane electrode (8) arranged on the measuring membrane and at least one electrode (10, 12) on the counter body side, wherein according to the invention at least one membrane electrode (2) comprises a titanium oxide.

Description

technical field [0001] The invention relates to a capacitive ceramic pressure measuring sensor and a production method thereof. Background technique [0002] Conventional pressure measuring sensors have a ceramic measuring membrane and a ceramic base body, the measuring membrane is press-fitted to the base body along the circumferential connection head, in particular with an active brass solder, wherein between the measuring membrane and the ceramic base body a There is a pressure chamber, wherein the equilibrium position of the measuring membrane results from the difference between the prevailing pressure in the pressure chamber and the acting pressure of the measuring membrane on the outside facing away from the pressure chamber. Common pressure measuring sensors also include capacitive transducers for converting the pressure-dependent deformation of the measuring membrane into an electrical signal. [0003] In particular aluminum oxide ceramics are used as material for t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
CPCG01L9/0075B23K2103/52B23K1/0016B23K1/19C23C8/16C23C14/0036C23C14/14C23C14/34G01L9/0072
Inventor 尼尔斯·波纳特安德烈亚斯·罗斯贝格
Owner EHNDRESS KHAUZER GMBKH KO KG
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