High-order resonance type quartz tuning fork micro-cantilever and manufacturing method thereof

Abstract

The invention relates to a high-order resonance type quartz tuning fork micro-cantilever and a manufacturing method thereof. The high-order resonance type quartz tuning fork micro-cantilever comprises a quartz tuning fork body which comprises a tuning fork base part, a vibration arm and a fixed arm. The vibration arm and the fixed arm are connected with the tuning fork base part. The vibration arm comprises a first area and a second area. The distance from the first area to the fixed arm is less than the distance from the second area to the fixed arm so that high-order eigenfrequency of the high-order resonance type quartz tuning fork micro-cantilever is enabled to be integral multiples of fundamental frequency. According to the high-order resonance type quartz tuning fork micro-cantilever and the manufacturing method thereof, coupling of high-order eigenmode vibration frequency and fundamental frequency is tuned, detection of more frequency signals apart from fundamental frequency can be realized, high sensitivity and resolution can be provided, and thus detection and research of nonlinearity of force between a probe tip and a sample and more physical properties of the sample can be realized.

Description

technical field [0001] The invention relates to the field of atomic force microscopy, in particular to a high-order resonance type quartz tuning fork micro-cantilever and a manufacturing method thereof. Background technique [0002] Continuous improvements in spatial resolution, data acquisition speed, and imaging of material properties have long been the goals of atomic force microscopy. The multi-frequency atomic force microscopy (Multi-frequency AFM, MF-AFM) developed in recent years is to excite and / or detect the vibration signal of the micro-cantilever probe at multiple frequencies to achieve sample characterization, etc. These vibration frequencies are usually related to High harmonic vibration or multiple eigenmodes of the cantilever. [0003] At present, the quartz tuning fork microcantilever has many incomparable advantages compared with the traditional silicon microcantilever: (1) The elastic constant k value of the quartz tuning fork is very large, and the distan...

AI Technical Summary

Problems solved by technology

[0005] Traditional atomic force microscopy only excites and detects at the fundamental mode frequency of the microcantilever, and the frequencies outside the fundamental frequency are usually higher and the signal intensity is smaller than the fundamental frequency part, so they are all ignored, resulting in mutual interference in other frequency parts. The force information is also lost

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