An acceleration measurement device and measurement method based on piezoelectric effect

Abstract

The invention discloses an acceleration measuring device and method based on a piezo-electronic effect. The acceleration measuring device comprises: a mass pendulum sheet unit, which is used for generating inertia force; a fixed loop unit, which keeps stationary relative to a carrier; a flexible quartz plate unit, which is connected to the mass pendulum sheet unit and the fixed loop unit; a deformation detection unit, which includes a nano wire and block electrodes positioned on the two ends of the nano wire respectively, wherein at least one block electrode and the nano wire together form a Schottky barrier, and the two ends of the nano wire are fixed to the mass pendulum sheet unit and the fixed loop unit through the block electrodes; a lead wire unit, which enables the deformation detection unit and a signal processing unit to be connected to form a loop; and the signal processing unit, which is used for providing voltage differences to the two ends of the deformation detection unit, measuring currents generated by the nano wire and obtaining acceleration according to the currents. A piezo-electronic effect is utilized to realize regulation and control for an interface junction zone barrier and a nano-material exhibits the quite unique mechanical performance, so the precision, sensitivity and measuring range for acceleration measuring are improved.

Description

technical field [0001] The invention relates to acceleration measurement, in particular to an acceleration measurement device and a measurement method based on piezoelectric electronics effects, belonging to the technical field of inertial guidance. Background technique [0002] In the navigation and positioning of various carriers, the trajectory of the moving object can be obtained by measuring the position, velocity or acceleration, but since only the acceleration can be measured inside the moving object, the measurement of acceleration is of great significance to inertial navigation technology. . An accelerometer is an inertial device used to sense the acceleration experienced by a vehicle. [0003] At present, there are mainly four types of accelerometers in inertial navigation systems: pendulum integrating gyro accelerometer, vibrating beam accelerometer, single crystal silicon micro accelerometer and force balance accelerometer, each has its own advantages and disadv...

AI Technical Summary

Problems solved by technology

At present, the quartz flexible accelerometer is mainly a mechanical pendulum accelerometer that integrates the flexible support part and the capacitive sensor. The capacitive sensor is used as the sensitive unit for measuring the flexible deformation. Therefore, the problems of the capacitive sensor are also The disadvantage of this kind of accelerometer is that, for example, the increase of the range of the capacitive sensor usually means the increase of the distance between the electrode plates, which will lead to the decrease of the measurement accuracy of the small deformation and the increase of the device volume

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