Flexible MEMS bubble pressure sensor, and application and preparation method thereof
A technology of bubble pressure and sensors, which is applied in the direction of fluid pressure measurement by changing ohmic resistance, can solve the problems of large volume size and complex manufacturing process, and achieve the effects of low production cost, good biocompatibility and simple structure
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0042] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0043] Such as Figure 1a , 1b As shown, the present embodiment provides a flexible MEMS bubble pressure sensor, comprising: a microcavity 3, a pair of measuring electrodes 4, and two microchannels 5, wherein: the microcavity 3 is long and narrow, with one end closed and the other One end is open, and the opening is composed of two microchannels 5; a pair of measuring electrodes 4 are respectively arranged at both ends of the microchannel 5, one measuring electrode 4 is located at the closed end o...
PUM
Property | Measurement | Unit |
---|---|---|
diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com