Flexible MEMS bubble pressure sensor, and application and preparation method thereof

A technology of bubble pressure and sensors, which is applied in the direction of fluid pressure measurement by changing ohmic resistance, can solve the problems of large volume size and complex manufacturing process, and achieve the effects of low production cost, good biocompatibility and simple structure

Active Publication Date: 2016-03-23
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, this structure and measurement principle usually imply complex fabrication process and relatively large volume size, and the device must be packaged to improve the biocompatibility of brittle materials such as silicon

Method used

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  • Flexible MEMS bubble pressure sensor, and application and preparation method thereof
  • Flexible MEMS bubble pressure sensor, and application and preparation method thereof
  • Flexible MEMS bubble pressure sensor, and application and preparation method thereof

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Embodiment Construction

[0042] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0043] Such as Figure 1a , 1b As shown, the present embodiment provides a flexible MEMS bubble pressure sensor, comprising: a microcavity 3, a pair of measuring electrodes 4, and two microchannels 5, wherein: the microcavity 3 is long and narrow, with one end closed and the other One end is open, and the opening is composed of two microchannels 5; a pair of measuring electrodes 4 are respectively arranged at both ends of the microchannel 5, one measuring electrode 4 is located at the closed end o...

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Abstract

The invention provides a flexible MEMS bubble pressure sensor, and application and a preparation method thereof. The flexible MEMS bubble pressure sensor comprises a microcavity, a pair of measuring electrodes and two micro channels, and utilizes a bubble as a pressure sensitive unit to measure the pressure value and variation for the liquid and the gas environment; when the ambient pressure changes, the volume of the bubble changes too, the environment pressure variation can be obtained by measuring the change of the bubble volume; the change of the bubble volume is measured, and the pair of measuring electrodes are arranged at two end of the bubble and alternating current is applied to the two ends of the bubble to measure the bubble impedance, and the impedance can directly reflect the bubble volume; the bubble is formed through utilization of capillary force, and formation of the bubble is spontaneous, and the bubble retention time can be prolonged through selection of the gas which is difficult to be dissolved in the liquid so that the measuring service life of the sensor can be prolonged; and after formation of the bubble, the surplus volume of the bubble is removed through the negative pressure suction mode so that a bubble with fixed and controllable size can be obtained and is used to measure the pressure. The flexible MEMS bubble pressure sensor has the advantages of being novel in the measurement principle, being simple in manufacturing process, being good in biocompatibility and being smaller in size.

Description

technical field [0001] The invention relates to a pressure sensor, especially a flexible MEMS bubble pressure sensor and a preparation method thereof, which are used for measuring the pressure of gas and liquid environments, and belong to the field of MEMS device design and manufacture. Background technique [0002] Pressure sensors for gas or liquid pressure measurement are widely used, and pressure sensors made of MEMS technology have the advantages of small size, low price, and mass production. Such miniaturized devices are especially convenient for integrated installation and measurement . In recent years, sensor technology has begun to be widely used in the field of biomedicine. Human physiological parameter pressure sensors are widely used in minimally invasive in vivo measurements, such as intracranial pressure monitoring, invasive intravascular blood flow pressure measurement, and intraocular pressure measurement. . [0003] In order to meet the requirements of min...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/04
CPCG01L9/04
Inventor 刘景全唐龙军杨斌陈翔杨春生
Owner SHANGHAI JIAO TONG UNIV
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