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A kind of control method and system of semiconductor production process recipe

A technology of production process and control system, applied in the direction of comprehensive factory control, comprehensive factory control, electrical program control, etc., can solve the problem of low reliability in the calibration of associated formulas

Active Publication Date: 2018-04-17
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a method and system for controlling semiconductor process recipes, which is used to solve the problem of low reliability in the prior art when artificially calibrating associated recipes

Method used

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  • A kind of control method and system of semiconductor production process recipe
  • A kind of control method and system of semiconductor production process recipe
  • A kind of control method and system of semiconductor production process recipe

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Embodiment 1

[0038] The present invention provides a control method for semiconductor production process formula, such as figure 1 As shown, the control method of the semiconductor production process formula at least includes the following steps:

[0039] Step 1, providing a group of process equipment with associated recipes stored;

[0040] Step 2, identifying the formula stored on one of the process equipment as the reference formula;

[0041] Step 3, refer to and compare the formulas stored on other process equipment in the group with the reference formula one by one, and generate a difference report, and judge the difference information between the formula of each process equipment in the difference report and the reference formula, if the difference information meets If the process requirements are met, it will be put into production; if it does not meet the requirements, it will be abandoned.

[0042] The method for controlling the semiconductor production process recipe of the pre...

Embodiment 2

[0058] The present invention also provides a management and control system for semiconductor production process formula, such as Figure 4 As shown, the management and control method for implementing the semiconductor production process recipe in the first embodiment, the management and control system includes at least: an identification module, a comparison module and a display module, and may also include a sign-off system sign-off module according to user requirements.

[0059] see Figure 4 , the identification module, the comparison module, the display module, and the sign-off system sign-off module constitute the interface program of the production application.

[0060] The identification module is used to identify the reference formula in the associated formula group. If an error occurs in the identification module and the reference formula cannot be found, the user is prompted to manually select a formula as the reference formula. For example, the formula with the best...

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Abstract

The invention provides a method and system for managing and controlling a semiconductor production process recipe. The method comprises steps of: providing a group of process apparatuses in which associated recipes are stored; identifying the recipe stored in a certain process apparatus as a reference recipe; and comparing the recipes stored in other process apparatuses in the group with the reference recipe one by one, generating a difference report, determining the difference information between the recipe of each process apparatus and the reference recipe, and initiating production if the difference information satisfies a process requirement or abandoning production if the difference information does not satisfy the process requirement. The system defines associated recipes and automatically executes reference management after the reference recipe is identified, and improves the reliability of a recipe disposition process.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a control method and system for a semiconductor production process formula. Background technique [0002] In the field of integrated circuit manufacturing, the production process recipe (Recipe) is a file that stores production process information, and its content can include multiple steps in the process of process processing, as well as various process parameter values ​​​​of each step and the duration of the step. These contents is saved on the device side. In the process of semiconductor manufacturing, every production link is inseparable from the recipe. The equipment can rely on the contents of the recipe to complete the processing of materials. From this, it can be seen that it is the production process recipe that really determines the steps and methods of production raw materials acting on the wafer. It is the key that directly affects the quality of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 范光瑛
Owner SEMICON MFG INT (SHANGHAI) CORP
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