sram test key, test device and sram test method
A test method and test key technology, which is applied in the semiconductor field, can solve problems such as unavoidable leakage current, poor precision, and slow measurement speed, and achieve the effects of improving accuracy, accurate capacitance value, and reducing the influence of current
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[0058] In the prior art, the bridge capacitance measurement method is used to measure the capacitance of the SRAM unit, which is difficult to avoid the influence of the leakage current, and the accuracy is poor, and each time the bridge capacitance measuring instrument needs to be calibrated before measurement, the measurement speed is relatively slow.
[0059] In order to solve the above problems, the present invention proposes a SRAM test key, a test device and a SRAM test method, wherein the SRAM test key comprises: a plurality of SRAM units, and the plurality of SRAM units comprise a plurality of data nodes, and the data nodes comprise word lines and bit lines; the first node is electrically connected to word lines or bit lines of multiple SRAM cells; the second node is electrically connected to other data nodes of multiple SRAM cells and is electrically connected to a common voltage power supply, said A test capacitance is formed between the second node and the first node;...
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