Contact type temperature non-inductive three-dimensional detection sensor based on fiber Bragg grating (FBG)

A fiber Bragg, three-dimensional detection technology, applied in instruments, measuring devices, optical devices, etc., can solve the problems of difficult to achieve precise online measurement, two-dimensional measurement errors, inability to separate, etc., to meet the requirements of industrial high-speed measurement, improve The effect of adaptability, simple data processing

Inactive Publication Date: 2012-07-18
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] 2. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement
[0014] 3. Insufficient detection ability of two-dimensional displacement direction
The one-dimensional micro-focus alignment measurement method proposed by Harbin Institute of Technology based on single-fiber probe measuring rod has coupling in two-dimensional displacement sensing. When the measured displacement is a two-dimensional position, the two-dimensional information obtained by this method There is a correlation between them, and they cannot be separated, resulting in a large error in the two-dimensional measurement, and the accurate measurement of the two-dimensional displacement cannot be realized

Method used

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  • Contact type temperature non-inductive three-dimensional detection sensor based on fiber Bragg grating (FBG)
  • Contact type temperature non-inductive three-dimensional detection sensor based on fiber Bragg grating (FBG)
  • Contact type temperature non-inductive three-dimensional detection sensor based on fiber Bragg grating (FBG)

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Experimental program
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Effect test

Embodiment 1

[0040] A contact-type temperature-insensitive three-dimensional detection sensor based on fiber Bragg gratings is composed of a broadband light source system 17, a temperature compensation system 15, a probe 9 and a signal receiving system 16; the broadband light source system 17 includes a pump laser 1, a WDM Coupler 2, erbium-doped fiber 3 and beam splitter 4, the two ends of erbium-doped fiber 3 are respectively connected with WDM coupler 2 and beam splitter 4, and the optical fiber connects pump laser 1 with WDM coupler 2 and WDM coupler respectively 2 communicates with the beam splitter 4; the signal receiving system 16 is composed of a spectrum analyzer 14, a fiber coupler 12 and a refractive index matching liquid 11, and the optical fiber connects the spectrum analyzer 14 with the fiber coupler 12, the fiber coupler 12 and the refraction The rate matching liquid 11 communicates; EDFA5, the first circulator 6, the guide tube 7, the reference FBG8, and the optical fiber bl...

Embodiment 2

[0045] The broadband light source system 17 is composed of a broadband light source 18 connected to an erbium-doped optical fiber 19. The broadband light source 18 directly generates a broadband light beam, which enters subsequent systems through the erbium-doped optical fiber 19. Other components and working principles of this embodiment are the same as those of Embodiment 1.

Embodiment 3

[0047] The signal receiving system 16 is composed of an optical power meter 20 , a fiber coupler 12 and a refractive index matching liquid 11 , and the light reflected by the FBG in the probe 9 is received by the optical power meter 20 . When the end of the probe 9 touches the sidewall of the microhole 10 to be tested, it will produce bending deformation (bending), which will cause the deviation of the FBG reflection center wavelength in the probe 9, but the reflection center wavelength of the reference FBG8 is constant, so The overlapping state of the reflected light spectrum of the reference FBG8 and the FBG of the probe 9 will change, and at this time the power of the returned light wave received by the optical power meter 20 will decrease rapidly, so as to sense the contact between the probe 9 and the surface to be measured. Other components and working principles of this embodiment are the same as those of Embodiment 1.

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Abstract

The invention discloses a contact type temperature non-inductive three-dimensional detection sensor based on a fiber Bragg grating (FBG) and belongs to the technical field of precision instrument manufacturing and precision test measurement. The sensor comprises a broadband light source system which consists of a pump laser, a wavelength division multiplexing (WDM) coupler, an erbium-doped fiber and a beam splitter, a temperature compensation system which consists of an erbium-doped fiber amplifier (EDFA), a first circulator, a guide pipe, a reference FBG and a fiber barrier, a probe, and a signal receiving system which consists of an optical spectrum analyzer, a fiber coupler and an index-matching fluid, wherein the reference FBG of the temperature compensation system is arranged in a spatial distance of 30 cm of the probe. By the sensor, three-dimensional sensing is realized, and the environmental adaptability of the sensor is greatly improved. The sensor has the characteristics of simple structure and high real-time performance and is easy to practically use. The sensor has the advantage of quick and ultra-precise measurement and calibration of small cavity size.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, in particular to a contact-type temperature-insensitive three-dimensional detection sensor based on an optical fiber Bragg grating. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision micro-cavity components has increased dramatically. Due to the limitation of the space scale and the influence of the measurement contact force, the precise measurement of the inner dimensions of the tiny inner cavity components has become difficult to achieve, especially the measurement depth is difficult to increase, which has become a "bottleneck" restricting the development of the industry. In order to achieve smaller internal dimension measurement and increase the measurement depth, the most widely used method is to use a slender probe to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 崔继文李磊杨福铃李俊英谭久彬
Owner HARBIN INST OF TECH
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