Micro-measurement Force Aiming Sensor Based on Co-spherical Coupling of Three Optical Fibers

Abstract

The invention provides a micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling and belongs to the technology of manufacturing and measurement of precise instruments. The sensor comprise a laser, a beam expanding and collimating mirror, an optical fiber coupling lens, a guide tube, a microscope objective b, a CCD camera b, a microscope objective a, a CCD camera a, a computer and a probe, wherein the probe is composed of an incidence optical fiber, a coupler, an emergent optical fiber a and an emergent optical fiber b. The coupler is used as a contact of the probe. A light beam is guided into the coupler through the incident optical fiber and then guided out through the emergent optical fiber a and the emergent optical fiber b, the light beam which is guided out enters the CCD camera a and the CCD camera b via the microscope objective a and the microscope objective b, and the central positions of energy of light spots formed by two emergent light beams respectively on the CCD cameras can be obtained through an image processing technology. The aiming condition on space of the sensor can be obtained according to the one-to-one corresponding relation between the central positions of energy of the light spots on the CCD cameras and the spatial positions of contact detected points of the sensor. The sensor is large in detectable depth-diameter ratio and has the three-dimension detection ability.

Description

technical field [0001] The invention belongs to precision instrument manufacturing and measurement technology, in particular to a micro-measurement force aiming sensor based on three-fiber co-spherical coupling. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitation of the space scale and the shadowing effect of the tiny components to be measured, as well as the influence of the measurement contact force, the precise measurement of the size of the tiny components has become difficult to achieve, especially the measurement depth of the tiny inner cavity components is difficult to increase, which has become a constraint for the development of the industry. "bottleneck". In order to achieve smaller size measurement and increase the measurement depth, the most widely used method is...

AI Technical Summary

Problems solved by technology

The low-light bead scattering imaging method of PTB in Germany is affected by the shadowing effect, which makes it difficult to improve the measurement depth and reduce the detection accuracy of the system

[0011] 2. It is difficult to further improve the displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve its displacement resolution

The optical path magnification of the optical measuring rod used in the detection method adopted by the National Institute of Standards and Technology is only 35 times, and the low primary magnification makes it difficult to further improve the displacement resolution.

[0012] 3. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The detection method adopted by the National Institute of Standards and Technology must use two-way area array CCDs to receive signal images, and a more complex image algorithm must be used to achieve high-resolution monitoring of the displacement of the optical fiber measuring rod, which leads to a large amount of data that the measurement system needs to process. increase and reduce the real-time performance of the detection system, it is difficult to realize the synchronization of the small inner cavity size and the synchronization of the aiming signal and the start and stop measurement in the process of two-dimensional coordinate measurement

[0013] 4. Insufficient detection ability of three-dimensional displacement direction

The probe structure based on dual-fiber coupling and the microhole measurement method based on orthogonal two-dimensional micro-focus alignment proposed by Harbin Institute of Technology do not have three-dimensional detection capabilities, and can only achieve micro-scale two-dimensional measurement, which cannot meet the current micro-scale The need for 3D measurement

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