Combination cantilever beam probe sensing method and device based on optical fiber exit light detection

Abstract

Provided are a combined cantilever beam (4) and probe (7) sensing method and apparatus based on optical fibre (2) emergent light detection, which falls within the technical field of dimensional measurement. Laser beams are focused by a lens (5) after being emitted via an optical fibre (2); the position of a focused light spot is detected by a photoelectric detector (6); when coming in contact with an object, the probe (7) drives the displacement of an emergent end of the optical fibre (2), which causes the displacement of the position of a light spot formed on the photoelectric detector (6) by focusing emergent light so as to complete sensing. The apparatus is formed by assembling a laser (1), an optical fibre (2), a clamp holder (3), a lens (5), a photoelectric detector (6), and a probe (7). The characteristics thereof are that: the probe (7) is easy to manufacture and meets the requirement of miniaturization, detection light has high intensity and is easy to detect, the probe has the capacity of three-dimensional detection and a strong resolution, and the overall apparatus is simple and small.

Description

technical field [0001] The invention belongs to the technical field of dimension measurement, and mainly relates to a combined cantilever beam probe sensing method and device based on optical fiber outgoing light detection. Background technique [0002] In the field of cavity structure measurement with micro-size and large depth-to-diameter ratio, the use of optical fiber to make probes is an important solution, which has the advantages of easy miniaturization and easy fabrication. The existing probes are as follows: [0003] (1) The "dual optical fiber coupling contact micro-measurement force aiming sensor" described in the application number 200510072254.5. In this patent, a new structure sensor is proposed, which uses two optical fibers to burn coupling balls to realize the reverse direction of light transmission and detection of the outgoing light. [0004] Similar patents include: dual-fiber co-spherical coupling micro-measurement force aiming sensor with end-face micr...

AI Technical Summary

Problems solved by technology

[0012] The disadvantages of the existing probes described in the above-mentioned documents and the referenced documents mentioned above are: (1) the probes are difficult to manufacture and are not easy to miniaturize; (2) the intensity of the probe light is weak and difficult to detect; ( 3) No or weak three-dimensional detection capability; (4) low resolution; (5) complex overall device

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