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Pore-free ceramic component

A technology of porous ceramics and parts, applied in the field of non-porous ceramic parts

Active Publication Date: 2016-04-06
SCHOTT AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] A disadvantage of making cordierite ceramics from glassy precursor materials is that cordierite ceramicizes rapidly from the surface or interface rather than in the bulk
Therefore, larger geometries and larger volumes, such as substrates with a thickness of 10 cm or more, cannot be obtained or can only be obtained with great difficulty by volume ceramization of glassy precursors

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 9

[0108] For Example 9, the size of the crystallites was determined. The average size of indica crystals is 53 nm, the average size of rutile crystals is 58 nm, and ZrTiO 4 The average size of the crystals was 54 nm. 63% by weight of the crystals are Indianite crystals, 3% by weight are rutile crystals, and 5% by weight are ZrTiO 4 Crystalline and the remainder 29% by weight amorphous phase.

[0109] figure 2 a and 2b show photographs of working examples of ceramics according to the invention. The thickness of the ceramic shown is 2 cm. As can be seen from fracture edge 40, the ceramic is homogeneous and non-porous in its overall volume.

[0110] image 3 The X-ray diffraction pattern of the working example (Example 2) is depicted. The main crystal phase of ceramics is formed by Indianite. In addition to Indian stone phases, rutile and ZrTiO 4 Crystallites exist as a subcrystalline phase. Reflections 50-57 can be assigned to the Indianite crystal phase, while reflecti...

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Abstract

The present invention relates to a pore-free ceramic having a high modulus of elasticity and a low coefficient of thermal expansion and also a process for producing a corresponding ceramic. Specifically, the invention relates to ceramics which can be used as dimensionally stable substrate materials in applications subjected to temperature gradients, for example in semiconductor manufacture.

Description

technical field [0001] The invention relates to a non-porous ceramic component having a high modulus of elasticity and a low coefficient of thermal expansion, a method for producing a corresponding ceramic component and the use of such a ceramic component. In particular, the present invention relates to a ceramic component that can be used as a dimensionally stable substrate material in applications subjected to temperature gradients, such as in semiconductor manufacturing. Background technique [0002] In the field of semiconductor manufacturing or (micro)lithography, ceramics composed of sintered cordierite are used, among others. These ceramics exhibit, for example, a relatively high modulus of elasticity (Young's modulus) and a low coefficient of thermal expansion, making such ceramics particularly suitable as particularly advantageous substrate materials, for example for silicon wafer stages. [0003] Ceramics of this type can be produced from powder precursors by a si...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/195
CPCC04B2235/3206C04B2235/3217C04B2235/3232C04B2235/3244C04B2235/3481C04B2235/36C04B2235/65C04B2235/6562C04B2235/6567C04B2235/9607C03C3/085C03C10/0045C04B35/195C04B2235/3222C04B2235/3258C04B2235/77C04B2235/785C04B2235/80C04B2235/95C04B2235/96C04B35/14C04B2235/3249C03C4/0028
Inventor B·施罗德U·沃尔佛S·汉森
Owner SCHOTT AG
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