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OLED evaporation equipment and organic light-emitting layer preparation process of OLED devices

A technology of evaporation and equipment, applied in the field of organic light-emitting layer preparation technology, can solve the problems of organic light-emitting layer color mixing, affecting the performance of OLED devices, etc., and achieve the effect of improving performance

Active Publication Date: 2018-10-23
KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Based on this, it is necessary to provide an OLED vapor deposition equipment and Preparation process of organic light-emitting layer of OLED device

Method used

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  • OLED evaporation equipment and organic light-emitting layer preparation process of OLED devices
  • OLED evaporation equipment and organic light-emitting layer preparation process of OLED devices
  • OLED evaporation equipment and organic light-emitting layer preparation process of OLED devices

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Embodiment Construction

[0035] In order to make the technical solution of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0036] see figure 1 , as Embodiment 1 of the OLED evaporation equipment 100 of the present invention, it includes an evaporation process chamber 110 . Wherein, the evaporation chamber 110 is provided with an evaporation chamber 111 and a base 112 . The evaporation cavity 111 is used for placing the evaporation material 300 . The base 112 is used to fix and place the substrate 200 . Moreover, the vapor deposition chamber 111 is disposed opposite to the base 112 and can move relative to each other. Meanwhile, an opening 1110 is provided on the sidewall of the evaporation chamber 111 facing the substrate 200 , and the size of the opening 1110 is less than or equal to 120 μm. Thus, when preparing the organic light-emitting layer on the OLED device substrate 200,...

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Abstract

The present invention disclosed a organic light layer preparation process for OLED steaming equipment and OLED devices. Its OLED steaming equipment includes steam -plated craft room; steam -plated cavity and base platform in the steam -plating process;Relatively settings, and can be relative to move; the base platform is used for fixed substrates; steaming cavity is used to place steamed plating materials; the side wall of the steaming coating is located in the side wall of the substrate; the size of the opening is less than or equal to 120 μm.By designing the size of the steaming cavity to be less than or equal to 120 μm, it realizes the point printed steaming plating of organic luminous materials. It does not need to be covered with a sheet.The phenomenon of mixing the organic light layer finally effectively solves the problem of using the traditional steaming process to prepare the OLED device with a large size of the substrate.

Description

technical field [0001] The invention relates to the field of display device preparation, in particular to OLED evaporation equipment and a preparation process for an organic light-emitting layer of an OLED device. Background technique [0002] At present, when the organic light-emitting layer in OLED (Organic Light-Emitting Diode) device is prepared, vacuum evaporation technology is usually used. That is, FMM (Fine-Metal-Mask, high-definition metal mask) is the main method, and organic materials (such as: R, G, B three-color organic light-emitting materials) are evaporated onto the substrate in a vacuum environment. When the size of the substrate of the prepared OLED device is relatively large, the size of the mask used therein will also increase correspondingly. However, due to the increase of its own gravity and thermal expansion, the oversized mask is easy to deform, which affects the alignment accuracy between the mask and the substrate, resulting in the phenomenon of c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/12H01L51/56
CPCC23C14/12C23C14/24H10K71/164H10K71/166
Inventor 党鹏乐张秀玉丁立薇张小宝姜海斌朱晖
Owner KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT