Gas pipeline with high-sensitivity humidity detection device

A humidity detection device and gas pipeline technology, applied in the pipeline field, can solve the problems of not detecting water vapor, etc., achieve high repeatability, increase the humidity sensitivity performance, and solve the effect of performance degradation

Inactive Publication Date: 2016-04-20
肖小渝
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, existing gas pipelines generally do not have the ability to detect water vapor in their surrounding environment

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] A gas pipeline with a high-sensitivity humidity detection device, the outside of the gas pipeline is equipped with a moisture-sensitive sensor module, the humidity-sensitive sensor module includes a heavily doped silicon chip arranged in sequence from bottom to top, close to the heavily doped SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 70nm, 280nm and 300nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer is modified by plasma to produce hydroxyl groups, The carbon nanotube layer has been tr...

Embodiment 2

[0058] A gas pipeline with a high-sensitivity humidity detection device, the outside of the gas pipeline is equipped with a moisture-sensitive sensor module, the humidity-sensitive sensor module includes a heavily doped silicon chip arranged in sequence from bottom to top, close to the heavily doped SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 60nm, 400nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon nanotube layer has b...

Embodiment 3

[0077] A gas pipeline with a high-sensitivity humidity detection device, the outside of the gas pipeline is equipped with a moisture-sensitive sensor module, the humidity-sensitive sensor module includes a heavily doped silicon chip arranged in sequence from bottom to top, close to the heavily doped SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 30nm, 270nm and 360nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon nanotube layer has b...

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Abstract

The invention discloses a gas pipeline with a high-sensitivity humidity detection device. Due to the fact that a humidity sensitive sensor module is installed on the exterior of the gas pipeline, the content of water steam in the environment can be detected by the gas pipeline in the using process, and therefore safe working of the gas pipeline is guaranteed; creative design is conducted on the humidity sensitive sensor module in multiple aspects of sensitive materials, making conditions, structures and the like of a sensor, the response speed is high, the sensitivity is greatly improved, the test repeatability is good, unexpected technical effects are achieved, and the great market application prospect is achieved.

Description

technical field [0001] The invention belongs to the field of pipelines, and more specifically relates to a gas pipeline with a highly sensitive humidity detection device. Background technique [0002] A pipeline is a device used to transport gas, liquid, etc. connected by pipes, pipe connectors and valves. A gas pipeline is a pipeline used to transport gas. [0003] However, existing gas pipelines generally do not have the ability to detect water vapor in their surrounding environment. Contents of the invention [0004] Aiming at the problems existing in the background technology, the present invention provides a gas pipeline with a highly sensitive humidity detection device. [0005] The object of the present invention is achieved through the following technical solutions: [0006] A gas pipeline with a high-sensitivity humidity detection device is characterized in that a moisture-sensitive sensor module is installed on the outside of the gas pipeline. Since the gas pip...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22B82Y30/00B82Y40/00
CPCG01N27/221B82Y30/00B82Y40/00G01N27/223G01N27/226G01N2027/222
Inventor 肖小玉
Owner 肖小渝
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