The invention discloses a preparation method for a CoTiO3 nanoarray
humidity-sensitive film. The preparation method comprises the following steps: adding a hydrochloric solution of TiCl3 into a
cobalt chloride aqueous solution to obtain a
mixed solution A; regulating the pH value of the
mixed solution to be 6-10, and obtaining a precursor solution B; transferring the precursor solution B into a
hydrothermal reaction kettle, soaking a cleaned
silicon substrate in the precursor solution B for reaction, and washing the
silicon substrate to obtain a film C on the
silicon substrate; putting the silicon substrate provided with the film C onto a sample stage of a magnetron
sputtering apparatus, performing magnetron
sputtering by adopting a Co2O3 radio-frequency target and a TiO2 radio-frequency target, and forming a film D on the silicon substrate; keeping the silicon substrate provided with the film D at a temperature
ranging from 600 DEG C to 750 DEG C, and obtaining the CoTiO3 nanoarray
humidity-sensitive film. The preparation method can effectively regulate and control the morphology of the film, is good in film-forming property, convenient to carry out, short in production period, high in efficiency and suitable for industrial production. The prepared CoTiO3 film has excellent
moisture sensitivity at the
room temperature and is short in response-
recovery time.