Switch voltage stabilizer based on calibration environment humidity changes
A switching regulator, environmental humidity technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of lack of water vapor detection function in the surrounding environment, equipment corrosion, etc., to increase the humidity sensitivity performance and short response time , to solve the effect of performance degradation
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Embodiment 1
[0039] A switching regulator based on changes in the humidity of the calibrated environment. A humidity-sensitive sensor module is installed outside the cabinet of the switching voltage regulator. The humidity-sensitive sensor module includes heavily doped silicon chips, tight SiO attached to heavily doped silicon wafers 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 75nm, 250nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon na...
Embodiment 2
[0058] A switching regulator based on changes in the humidity of the calibrated environment. A humidity-sensitive sensor module is installed outside the cabinet of the switching voltage regulator. The humidity-sensitive sensor module includes heavily doped silicon chips, tight SiO attached to heavily doped silicon wafers 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 85nm, 125nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon na...
Embodiment 3
[0077] A switching regulator based on changes in the humidity of the calibrated environment. A humidity-sensitive sensor module is installed outside the cabinet of the switching voltage regulator. The humidity-sensitive sensor module includes heavily doped silicon chips, tight SiO attached to heavily doped silicon wafers 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 95nm, 160nm and 400nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon na...
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