Storage battery module for quickly responding humidity change
A battery module and humidity change technology, applied in the direction of secondary batteries, circuits, electrical components, etc., can solve the problems of battery module corrosion, no environmental humidity detection, failure, etc., achieve fast response, increase humidity sensitivity, The effect of simple production process
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Embodiment 1
[0037] A battery module for rapidly responding to changes in humidity, a humidity sensor module is mounted on the outside of the battery module, the humidity sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top flakes of SiO 2 layer, carbon nanotube layer, on SiO 2 A lower electrode between layers and an upper electrode on a carbon nanotube layer grown on SiO 2 layer; there is a metal thin film on the lower electrode, and the metal thin film is, from inside to outside, a Cr layer with adhesion, a Cu layer with electrical and thermal conductivity, and an Au layer as an electrode layer. The Cr layer, the Cu layer and the The thickness of the Au layer is 70 nm, 200 nm and 500 nm in turn; the carbon nanotube layer is grown locally by using catalyst and / or photolithography, and the grown carbon nanotube layer is modified by plasma to generate hydroxyl groups, The carbon nanotube layer is treated with a mixed solution of acetic acid and hydro...
Embodiment 2
[0056] A battery module for rapidly responding to changes in humidity, a humidity sensor module is mounted on the outside of the battery module, the humidity sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top flakes of SiO 2 layer, carbon nanotube layer, on SiO 2 A lower electrode between layers and an upper electrode on a carbon nanotube layer grown on SiO 2 layer; there is a metal thin film on the lower electrode, and the metal thin film is, from inside to outside, a Cr layer with adhesion, a Cu layer with electrical and thermal conductivity, and an Au layer as an electrode layer. The Cr layer, the Cu layer and the The thickness of the Au layer is 70nm, 100nm and 500nm in turn; the carbon nanotube layer is grown locally by using catalyst and / or photolithography, and the grown carbon nanotube layer is modified by plasma to generate hydroxyl groups, The carbon nanotube layer is treated with a mixed solution of acetic acid and hydrogen...
Embodiment 3
[0075] A battery module for rapidly responding to changes in humidity, a humidity sensor module is mounted on the outside of the battery module, the humidity sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top flakes of SiO 2 layer, carbon nanotube layer, on SiO 2 A lower electrode between layers and an upper electrode on a carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 80nm, 80nm and 400nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon nanotube layer has been treated with a mixed solution of acetic acid an...
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