Humidity sensor and improvement and preparation of humidity sensor based on graphene oxide

Abstract

The invention discloses a humidity sensor and improvement and preparation of the humidity sensor based on graphene oxide. The humidity sensor is provided with a humidity sensitivity component based ona reduced graphene oxide material, a graphene oxide material is treated by hydrobromic acid solution to obtain the reduced graphene oxide material in the humidity sensitivity component, the humiditysensitivity component can respond to environment humidity, and the environment humidity is sensed. According to the humidity sensor, a treatment process of the key graphene material humidity sensitivity component in the humidity sensor and a micro-composition, a structure and the like of the correspondingly acquired reduced graphene oxide material are improved, the graphene oxide material is treated by the hydrobromic acid solution to obtain the reduced graphene oxide material or the graphene oxide material and a polycationic polymer alternately deposit to form a graphene oxide composite filmby an electrostatic inducement layer by layer self-assembly method, and the acquired humidity sensor can keep good stability, humidity sensitivity and humidity stickiness in high-humidity environments.

Description

technical field [0001] The invention belongs to the field of microelectronics technology, and more specifically, relates to a humidity sensor and an improved method and preparation method of a humidity sensor based on graphene oxide, especially an improvement / preparation method for a high-sensitivity humidity sensor used in a high-humidity environment. The improvement / The preparation method can obtain a miniature humidity sensor with improved detection performance. Background technique [0002] Humidity sensors are closely related to atmospheric monitoring, industrial production, and biomedical fields. Graphene with high specific surface area, high light transmittance, high thermal conductivity, high electrical conductivity, and high mechanical strength is an ideal humidity-sensitive material for making humidity-sensitive thin film sensors. one. In recent years, there has been a lot of research on the humidity sensor of graphene and its derivatives. Qingwu Huang et al. use...

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Problems solved by technology

[0004] Utilize graphene oxide to make the precision of the method for humidity sensor in the literature, wet hysteresis and high-humidity stability can not be guaranteed effectively, especially in high-humidity environment (as humidity is greater than 70%RH, especially humidity is greater than 90%RH The stability, humidity sensitivity and hysteresis of the sensor in the environment) are the key issues to be solved in the research.

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