Humidity sensor and improvement and preparation of humidity sensor based on graphene oxide

A humidity sensor and graphene technology, applied in the field of microelectronics, can solve the problems of accuracy, humidity hysteresis, and high humidity stability that cannot be effectively guaranteed, and achieve the goal of improving the change rate of humidity sensitive resistance, improving sensitivity, and enhancing conductivity Effect

Inactive Publication Date: 2018-08-17
HUAZHONG UNIV OF SCI & TECH +1
View PDF5 Cites 11 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Utilize graphene oxide to make the precision of the method for humidity sensor in the literature, wet hysteresis and high-humidity stability can not be guaranteed effectively, especially in high-humidity enviro

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Humidity sensor and improvement and preparation of humidity sensor based on graphene oxide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0019] The preparation process of the humidity sensor has the following steps: (a) Soak in dilute sulfuric acid and sodium hydroxide for 15 minutes to remove the stains on the surface of the substrate element; (b) Prepare the metal on the flexible substrate PI by photolithography Electrode Ni / Au (10nm, 50nm); (c) put the graphene oxide film in 40wt% hydrobromic acid and soak it for 30s at room t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a humidity sensor and improvement and preparation of the humidity sensor based on graphene oxide. The humidity sensor is provided with a humidity sensitivity component based ona reduced graphene oxide material, a graphene oxide material is treated by hydrobromic acid solution to obtain the reduced graphene oxide material in the humidity sensitivity component, the humiditysensitivity component can respond to environment humidity, and the environment humidity is sensed. According to the humidity sensor, a treatment process of the key graphene material humidity sensitivity component in the humidity sensor and a micro-composition, a structure and the like of the correspondingly acquired reduced graphene oxide material are improved, the graphene oxide material is treated by the hydrobromic acid solution to obtain the reduced graphene oxide material or the graphene oxide material and a polycationic polymer alternately deposit to form a graphene oxide composite filmby an electrostatic inducement layer by layer self-assembly method, and the acquired humidity sensor can keep good stability, humidity sensitivity and humidity stickiness in high-humidity environments.

Description

technical field [0001] The invention belongs to the field of microelectronics technology, and more specifically, relates to a humidity sensor and an improved method and preparation method of a humidity sensor based on graphene oxide, especially an improvement / preparation method for a high-sensitivity humidity sensor used in a high-humidity environment. The improvement / The preparation method can obtain a miniature humidity sensor with improved detection performance. Background technique [0002] Humidity sensors are closely related to atmospheric monitoring, industrial production, and biomedical fields. Graphene with high specific surface area, high light transmittance, high thermal conductivity, high electrical conductivity, and high mechanical strength is an ideal humidity-sensitive material for making humidity-sensitive thin film sensors. one. In recent years, there has been a lot of research on the humidity sensor of graphene and its derivatives. Qingwu Huang et al. use...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N27/12
CPCG01N27/125
Inventor 臧剑锋段小燕王钟平
Owner HUAZHONG UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap