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Vacuum packaging equipment based on quick response to humidity changes

A technology of vacuum packaging and humidity change, which is applied in the direction of measuring devices, instruments, and material analysis through electromagnetic means. It can solve the problems of humidity detection without pumping, increase moisture sensitivity, facilitate mass production, and promote adsorption. The effect of action

Inactive Publication Date: 2016-06-15
肖白玉
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the existing vacuum packaging equipment generally does not have the detection of the suction humidity

Method used

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  • Vacuum packaging equipment based on quick response to humidity changes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] A vacuum packaging equipment based on rapid response to humidity changes. The bottom of the cabinet of the vacuum packaging equipment is equipped with a humidity sensor module. The humidity sensor module includes heavily doped silicon chips arranged in sequence from bottom to top. Doped SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 30nm, 300nm and 300nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon nanotube layer has been tr...

Embodiment 2

[0058] A vacuum packaging equipment based on rapid response to humidity changes. The bottom of the cabinet of the vacuum packaging equipment is equipped with a humidity sensor module. The humidity sensor module includes heavily doped silicon chips arranged in sequence from bottom to top. Doped SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 30nm, 400nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer is modified by plasma to produce hydroxyl groups, The carbon nanotube layer has been treated ...

Embodiment 3

[0077] A vacuum packaging equipment based on rapid response to humidity changes. The bottom of the cabinet of the vacuum packaging equipment is equipped with a humidity sensor module. The humidity sensor module includes heavily doped silicon chips arranged in sequence from bottom to top. Doped SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 30nm, 260nm and 360nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer is modified by plasma to produce hydroxyl groups, The carbon nanotube layer has been treated ...

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Abstract

The invention discloses a vacuum packaging device based on rapid response to humidity changes. By installing a humidity sensor module at the bottom of the cabinet of the vacuum packaging device, the vacuum packaging device can detect the humidity of the gas environment during the working process. Changes, which play a very good role in protecting the normal operation of the vacuum packaging equipment; the humidity sensor module is creatively designed from the sensor's sensitive materials, manufacturing conditions, structure, etc., so that the response speed is fast and the sensitivity is greatly improved. The test has good repeatability, has produced unexpected technical effects, and has great market application prospects.

Description

technical field [0001] The invention belongs to the field of packaging, and more specifically relates to a vacuum packaging device based on rapid response to humidity changes. Background technique [0002] Vacuum packaging equipment can automatically extract the air in the packaging bag, and can also refill it with nitrogen or other protective gas, and then complete the sealing process. Vacuum packaging equipment is often used in the food industry, etc. [0003] However, the existing vacuum packaging equipment generally does not have the detection of the suction humidity. Contents of the invention [0004] Aiming at the problems in the background technology, the present invention provides a vacuum packaging device based on rapid response to humidity changes. [0005] The object of the present invention is achieved through the following technical solutions: [0006] A vacuum packaging equipment based on rapid response to humidity changes, characterized in that a humidity...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22G01N33/00
CPCG01N27/223G01N33/0004
Inventor 肖白玉
Owner 肖白玉
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