Humidity sensor film based on microregion redissolution reaction and preparation method thereof

Abstract

The invention discloses a humidity sensor film based on a microregion redissolution reaction and a preparation method thereof, and belongs to the technical field of the composite material and humidity sensor. The preparation method comprises the following steps: based on the technology and feature of an atomization process, such as the gas release, dissociating uniform solution to micron-type microdrops, conveying the microdrops to a film formation substrate by the gas, forming the micron-type redissolution reaction microregion in the guide layer film, and reacting by two or more materials in the microregion and finishing the film deposition process. The preparation method is capable of overcoming the problem in the traditional film preparation process that two or more materials cannot form the film because of the reaction deposition between the materials or the bad effect of the solution dispersion state caused by the generation. The humidity-sensitivity film prepared by the preparation method is capable of obviously improving the sensor feature characters, such as wet hysteretic property, because of the physical and chemical reactions, such as the bonding between the materials, and the electrostatic adsorption.

Description

technical field [0001] The invention relates to the field of composite materials and humidity sensors, in particular to a method for improving hysteresis of a thin-film humidity sensor based on a micro-region redissolution reaction. Background technique [0002] Humidity is one of the important parameters for environmental monitoring. It is difficult to measure humidity accurately, because humidity is an independent parameter, and the water vapor content in the air is very small, and it is difficult to concentrate on the surface of the humidity sensitive element, so it has to be separated according to the laws of physics and chemistry. The humidity value can only be obtained by converting to measuring secondary parameters related to humidity and then converting them. However, these secondary parameters are greatly affected by other factors such as atmospheric pressure and temperature, which makes humidity measurement more difficult. With the gradual deepening of people's un...

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Problems solved by technology

[0004] However, the above reports have little research on the hysteresis performance, and do not involve the process of how to reduce the hysteresis performance of the sensor.

In the process of material compounding, in order to enhance the hysteresis performance, it is often necessary to have strong interaction forces (such as chemical bonds, ionic bonds, etc.) As a result, insoluble matter is generated and solid phases such as precipitation are formed, so that the composite material cannot be fully dispersed and prepared on the surface of the substrate by the solution method

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