Electric vehicle charging station for resistance to water vapor corrosion
A technology for electric vehicles and charging stations, applied in the field of charging stations, can solve the problems of no ability to detect environmental humidity, waste of manpower and material resources, corrosion of charging equipment, etc., to increase humidity sensitivity performance, promote adsorption, and response time short effect
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Embodiment 1
[0039] An electric vehicle charging station for preventing vapor corrosion, each charging pile of the electric vehicle charging station is equipped with a moisture-sensitive sensor module, and the humidity-sensitive sensor module includes heavily doped silicon wafers arranged sequentially from bottom to top , SiO close to the heavily doped silicon wafer 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 60nm, 200nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydr...
Embodiment 2
[0058] An electric vehicle charging station for preventing vapor corrosion, each charging pile of the electric vehicle charging station is equipped with a moisture-sensitive sensor module, and the humidity-sensitive sensor module includes heavily doped silicon wafers arranged sequentially from bottom to top , SiO close to the heavily doped silicon wafer 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 70nm, 90nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydro...
Embodiment 3
[0077] An electric vehicle charging station for waterproof vapor corrosion, a humidity sensor module is installed outside each charging pile of the electric vehicle charging station, the humidity sensor module comprises heavily doped silicon wafers arranged in sequence from bottom to top , SiO close to heavily doped silicon wafer 2 layer, carbon nanotube layer, on SiO 2 A lower electrode between layers and an upper electrode on a carbon nanotube layer grown on SiO 2 layer; there is a metal thin film on the lower electrode, and the metal thin film is, from inside to outside, a Cr layer with adhesion, a Cu layer with electrical and thermal conductivity, and an Au layer as an electrode layer. The Cr layer, the Cu layer and the The thickness of the Au layer is 50 nm, 80 nm and 400 nm in turn; the carbon nanotube layer is grown locally by using catalyst and / or photolithography, and the grown carbon nanotube layer is modified by plasma to generate hydroxyl groups, The carbon nanot...
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