Numerically controlled lathe for preventing water vapor corrosion
A numerical control lathe and waterproof steam technology, which is applied in the field of numerical control lathes, can solve the problems of corrosion of numerical control lathe equipment, no environmental humidity detection, failure, etc., and achieves the effects of solving performance degradation, increasing humidity-sensitive performance, and simplifying the production process.
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Embodiment 1
[0039] A numerically controlled lathe for preventing vapor corrosion. A moisture sensitive sensor module is installed on the outside of the numerically controlled lathe. The moisture sensitive sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top, and is closely attached to the heavily doped silicon wafers. SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 200nm, 200nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl...
Embodiment 2
[0058] A numerically controlled lathe for preventing vapor corrosion. A moisture sensitive sensor module is installed on the outside of the numerically controlled lathe. The moisture sensitive sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top, and is closely attached to the heavily doped silicon wafers. SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 100nm, 200nm and 500nm in sequence; the carbon nanotube layer is grown by catalyst and / or photolithography, and the grown carbon nanotube layer is modified by plasma to produce hydroxyl groups, The carbon nanotu...
Embodiment 3
[0077] A numerically controlled lathe for preventing vapor corrosion. A moisture sensitive sensor module is installed on the outside of the numerically controlled lathe. The moisture sensitive sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top, and is closely attached to the heavily doped silicon wafers. SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 200nm, 260nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer is modified by plasma to produce hydroxyl...
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