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Vacuum pump for preventing water vapor corrosion

A vacuum pump and waterproof technology, which is applied in the direction of pumps, pump testing, instruments, etc., can solve the problems of not having the function of moisture-sensitive detection, and achieve the effects of increasing moisture-sensitive performance, solving performance degradation, and promoting adsorption

Inactive Publication Date: 2016-03-30
韦醒妃
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, due to the relatively precise physical structure of the vacuum pump, the impact of humidity on the equipment in the environment where the vacuum pump is used in research, experiments, etc. is inevitable, and the existing vacuum pumps generally do not have the function of humidity-sensitive detection.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0039] A vacuum pump for preventing vapor corrosion. A moisture-sensitive sensor module is installed outside the pump body of the vacuum pump. The moisture-sensitive sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top, and is close to the heavily doped silicon wafer. SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 40nm, 240nm and 400nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer is modified by plasma to produce hydroxyl groups, The carbon nanotube layer has ...

Embodiment 2

[0058] A vacuum pump for preventing vapor corrosion. A moisture-sensitive sensor module is installed outside the pump body of the vacuum pump. The moisture-sensitive sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top, and is close to the heavily doped silicon wafer. SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 30nm, 125nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon nanotube laye...

Embodiment 3

[0077] A vacuum pump for preventing vapor corrosion. A moisture-sensitive sensor module is installed outside the pump body of the vacuum pump. The moisture-sensitive sensor module includes heavily doped silicon wafers arranged in sequence from bottom to top, and is close to the heavily doped silicon wafer. SiO 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 60nm, 160nm and 400nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydroxyl modification, The carbon nanotube laye...

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Abstract

The invention discloses a vacuum pump for preventing water vapor corrosion. According to the vacuum pump disclosed by the invention, by installing a humidity-sensitive sensor module at the outer part of a pump body of the vacuum pump, the variation of humidity in a surrounding environment of the vacuum pump can be detected during a using process of the vacuum pump, and the vacuum pump can be well protected; the humidity-sensitive sensor module is creatively designed in many aspects of sensitive materials, manufacturing conditions, structures and the like of sensors, so that the sensitivity of the humidity-sensitive sensor module is greatly increased, the testing repeatability is good, an unexpected technical effect is generated, and a very large market application prospect is obtained.

Description

technical field [0001] The invention belongs to the field of vacuum pumps, and more specifically relates to a vacuum pump used for preventing vapor corrosion. Background technique [0002] Vacuum pump refers to the vacuum device or equipment obtained by pumping the pumped container by physical, mechanical, chemical and other methods, that is, a vacuum pump is a device that uses various methods to improve, generate and maintain vacuum in a certain confined space. [0003] However, due to the relatively precise physical structure of the vacuum pump, the influence of humidity on the equipment in the environment where the vacuum pump is used in research, experiments, etc. is unavoidable, and the existing vacuum pumps generally do not have a humidity-sensitive detection function. Contents of the invention [0004] Aiming at the problems in the background technology, the present invention provides a vacuum pump for preventing vapor corrosion. [0005] The object of the present ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22F04B37/14F04B51/00
CPCG01N27/225F04B37/14F04B51/00
Inventor 韦醒妃
Owner 韦醒妃
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