Vacuum pump and manufacturing method thereof
A manufacturing method and vacuum pump technology, which are applied in electrical excitation analysis, material excitation analysis, etc., can solve the problems of vacuum pump not having gas detection function, hidden dangers of personnel and equipment safety, etc., and achieve short recovery time, fast response speed, and large market prospects. Effect
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Embodiment 1
[0050] A vacuum pump, a gas detection module is installed outside the vacuum pump, and the gas detection module is made by the following method:
[0051] The specific process is: surface cleaning and treatment of conductive plastic ITO-PET—substrate placed in a vacuum chamber—vacuum vapor deposition of organic layers—evaporated metal electrodes—package or test.
[0052] 1. Conductive plastic ITO-PET cleaning
[0053] First, cut ITO-PET of a specific size, scrub the ITO-PET substrate with special detergent and clean cloth to remove various oil stains on the substrate, and then put in compound biological enzyme solution, deionized water, In acetone and ethanol, sonicated for 35min each; then, dry the ITO-PET with high-purity nitrogen to evaporate the ethanol, then put it into the pretreatment chamber, continuously feed high-purity oxygen, and bombard the substrate with plasma for 5min;
[0054] The components of the composite biological enzyme are: alkaline protease 0.5g / L, cel...
Embodiment 2
[0068] A vacuum pump, a gas detection module is installed outside the vacuum pump, and the gas detection module is made by the following method:
[0069] The specific process is: surface cleaning and treatment of conductive plastic ITO-PET—substrate placed in a vacuum chamber—vacuum vapor deposition of organic layers—evaporated metal electrodes—package or test.
[0070] 1. Conductive plastic ITO-PET cleaning
[0071] First, cut ITO-PET of specific size, scrub the ITO-PET substrate with special detergent and clean cloth to remove various oil stains on the substrate, and then put it in deionized water, acetone and ethanol in turn, Ultrasound for 15min each; then, dry the ITO-PET with high-purity nitrogen to evaporate the ethanol, then put it into the pretreatment chamber, continuously feed high-purity oxygen, and bombard the substrate with plasma for 5min;
[0072] 2. Preparation of Porous Structured YSZ
[0073] a) Weigh an appropriate amount of Ni(NO 3 ) 2 ·6H 2 O and dei...
Embodiment 3
[0085] A vacuum pump, a gas detection module is installed outside the vacuum pump, and the gas detection module is made by the following method:
[0086] The specific process is: surface cleaning and treatment of conductive plastic ITO-PET—substrate placed in a vacuum chamber—vacuum vapor deposition of organic layers—evaporated metal electrodes—package or test.
[0087] 1. Conductive plastic ITO-PET cleaning
[0088] First, cut ITO-PET of a specific size, scrub the ITO-PET substrate with special detergent and clean cloth to remove various oil stains on the substrate, and then put in compound biological enzyme solution, deionized water, In acetone and ethanol, each ultrasonic for 15min; then, dry the ITO-PET with high-purity nitrogen to evaporate the ethanol, and then put it into the pretreatment chamber, continuously feed high-purity oxygen, and bombard the substrate with plasma for 5min;
[0089] The components of the composite biological enzyme are: alkaline protease 0.2g / L...
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Abstract
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