A method and device for measuring the shape error of an unknown rotationally symmetric aspheric surface
A surface error and rotational symmetry technology, applied in the field of optical measurement, can solve the problems of low accuracy of the measurement method and the damage of the aspheric surface to be measured, and achieve the effect of simple measurement methods, many types, and high measurement accuracy.
Inactive Publication Date: 2018-04-06
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0006] In view of this, the object of the present invention is to provide a method for measuring the shape error of a rotationally symmetric unknown aspheric surface and its measuring device, so as to at least solve the problem that the geometric parameters corresponding to the aspheric surface need to be known in the past, and the measuring method The accuracy is not high, causing damage to the aspheric surface to be measured, etc.
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Embodiment 1
[0072] figure 1 Schematic diagram of the measurement device for the rotationally symmetric unknown aspheric surface shape error. The light emitted by the target measuring head 1004 in the multi-wavelength interferometer 10 is vertically incident on the upper surface of the aspheric surface 15 to be measured, and the target is made The probe 1004 is always perpendicular to the surface of the aspheric surface 15 to be tested, and the distance from the target probe 1004 to the upper surface of the aspheric surface 15 to be tested is constant. The measured aspheric surface 15 fixed on the leveling and centering work 4 is driven by the air bearing turntable 3 to rotate around the rotating shaft at a uniform speed, and under the joint action of the translation and rotation of the target probe 1004, the entire measured aspheric surface 15 is realized. face scan. The function of the leveling and centering workbench 4 is to make the optical axis of the aspheric surface 15 to be measu...
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The invention discloses a method and a measuring device for measuring the shape error of an unknown rotationally symmetrical aspheric surface. The measuring method uses an interferometer to scan and sample point by point along the meridian direction of the surface of the aspheric surface to be measured, and obtain a set of parameters about the aspheric surface to be measured. The array L(x, z, t) of the space coordinates is calculated and obtained by using the least squares fitting method to obtain the vertex curvature radius R0, the quadratic term coefficient K and the high-order term coefficient An and the ideal sagittal surface of the aspheric surface to be measured, using The interferometer scans and samples the entire surface of the aspheric surface to be measured point by point to obtain the measured sagittal surface, and compares the measured sagittal surface with the ideal sagittal surface to obtain the surface shape error. The measuring device includes: air floating turntable, leveling and centering workbench, Two-dimensional motion table and T-direction rotating table, multi-wavelength interferometer, gantry crane bracket, etc. The invention has the advantages of high measurement precision, large measurement deviation, many types of measurement, non-contact measurement and the like.
Description
technical field [0001] The invention relates to the field of optical measurement, and in particular provides a method for measuring the shape error of an unknown rotationally symmetrical aspheric surface and a measuring device thereof. Background technique [0002] Most of the curved surfaces of the lenses and mirrors in the optical system are flat and spherical. The reason is that these simple curved surfaces are easy to process and detect, can be mass-produced, and are easy to meet high-precision surface requirements. The emergence of a high-precision surface shape detection interferometer greatly reduces the difficulty of high-precision plane and spherical surface shape detection. Nevertheless, in some high-precision imaging systems, such as lithography objective lenses and nuclear fusion systems, it is difficult to achieve the expected imaging quality only by using flat and spherical mirrors. However, the introduction of aspheric mirrors has successfully solved this prob...
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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 彭石军苗二龙高松涛武东城隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI