xy table, alignment device and evaporation device

Abstract

The XY workbench of the present invention has: a base (11); a frame-shaped workbench (12, 12); and a supporting driving part (13, 14, 15, 16), located between the base (11) and the workbench (12) , and drive the table (12) along the XY direction. The support driving part (13, 14, 15, 16) has a plurality of support parts, and the support part has: a linear first guide member arranged on the base (11); a first plate member placed on on the first guide member and can move along the first guide direction on the in-plane direction of the worktable (12), and the first guide direction is the direction in which the first guide member extends; the second guide member is placed on On the first plate member and extending along the second guiding direction, the second guiding direction is the in-plane direction of the worktable (12) perpendicular to the first guiding direction; and the second connection part is placed on the second The guide component is also fixedly arranged to be integrated with the worktable (12), so as to be able to move along the second guiding direction. Among the plurality of supporting parts, a pair of first supporting parts (13, 14) are placed in such a manner as to face each other in the X direction as the first guiding direction and are provided on the edge of the table (12), and a pair of second supporting parts The supporting parts (15, 16) are placed and provided on the edge part of the table (12) so as to face each other in the Y direction as the first guiding direction. The supporting driving part (13, 14, 15, 16) has a driving device (13f, 15f), and the driving device (13f, 15f) is provided on at least one of the pair of first supporting parts (13, 14) and At least one support part in a pair of second support parts (15, 16), the driving device (13f, 15f) is connected with the first plate part and the second plate part, and can move the first plate part and the second plate part along the The second guiding direction is relative to the drive.

Description

technical field [0001] The invention relates to an XY workbench, an alignment device and a vapor deposition device, in particular to a technique suitable for manufacturing organic EL elements or FPDs. [0002] this application claims priority based on Japanese Patent Application No. 2014-197436 for which it applied to Japan on September 26, 2014, and uses the content here. Background technique [0003] In the manufacture of an organic EL element or an FPD (flat panel display), etc., patterning is performed with high precision on a substrate using a deposition mask to form a plurality of striped thin film patterns. At this time, it is required to precisely align the substrate to be vapor-deposited with the position and rotation angle of two degrees of freedom in the horizontal direction. As shown in Patent Document 1, in order to satisfy the precision of such position control, an apparatus using interference drive having three drive shafts called a UVW stage is used. [000...

AI Technical Summary

Problems solved by technology

However, in this case, since the mass of the table is increased, the load applied to the motor provided on the lower table among the stacked tables is larger, so the positioning accuracy of the lower table is lower than that of the upper table. poor problem

In addition, in order to solve this problem, in the case of adopting a motor that can withstand a large load to the lower stage, the manufacturing cost increases due to the increase in the number of parts in the device structure.

In addition, since the actuators in the X-axis direction and the Y-axis direction are simultaneously driven during alignment, it is necessary to adjust the control of the upper stage and the lower stage for the control of the actuators, and even the control software has a heavy burden. large and thus unrealistic

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