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Voice-coil-motor-driven scanning micro-mirror

A technology for scanning micromirrors and voice coil motors, applied in the field of scanning micromirrors, can solve the problems that the volume of end products cannot be further reduced, the quality and volume of permanent magnets and electromagnets are large, and reduce electromagnetic interference, reduce quality and volume, Effects that improve directionality and accuracy

Inactive Publication Date: 2016-06-15
XINFOO SENSOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem in the above-mentioned prior art is that the permanent magnet or electromagnet used in the electromagnetic drive of the scanning micromirror needs to be provided with a magnetic shielding protective layer on the outside to prevent the electromagnetic interference caused by the external environment to the driving device and the driving device to the external environment. ; In addition, the mass and volume of permanent magnets and electromagnets are large, resulting in the inability to further reduce the size of the terminal product after assembly, which limits the development of scanning micromirrors in the direction of miniaturization and intelligence

Method used

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  • Voice-coil-motor-driven scanning micro-mirror
  • Voice-coil-motor-driven scanning micro-mirror
  • Voice-coil-motor-driven scanning micro-mirror

Examples

Experimental program
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Effect test

Embodiment 1

[0028] Embodiment 1: see image 3 and Figure 4 , a voice coil motor-driven scanning micromirror, including a mirror surface 10, the mirror surface 10 is driven by a voice coil drive motor, and the voice coil drive motor is composed of a Halbach permanent magnet array 20 and an energized coil 11. The energized coil 11 drives the mirror surface 10 to move in the magnetic field formed by the Halbach permanent magnet array 20 .

[0029] In this embodiment, the mirror 10 is twisted in a two-dimensional direction through the Y-axis bridge arm 12, the X-axis bridge arm 13 and the X-axis bridge arm support 14, and the energized coils 11 are respectively arranged on the mirror surface 10 and the X-axis bridge arm support 14. On the X-axis bridge arm bracket 14, specifically, it can be arranged on the front or back of the mirror surface and the front or back of the X bridge arm bracket, so as to drive the mirror surface to twist around the axis. The mirror surface 10, the energized co...

Embodiment 2

[0031] Example 2: see Figure 6 and Figure 7 , the other parts are the same as in Embodiment 1, the difference is that: the reflector surface 10 is circular, the shape of the energized coil 11 is annular, and the Halbach permanent magnet array is an annular array.

[0032] Here, there are multiple arrangements of the magnetic poles in the annular array, and different arrangements can form magnetic fields in different directions in the mirror surface space.

[0033] As an example, it can be the magnetic pole arrangement as shown in Figure 8(a), which can form a single-direction transverse magnetic field on the mirror surface space. This type of arrangement is similar to the direction of the magnetic field formed by the linear array in Embodiment 1. It can provide the driving torque for the mirror surface to twist around the X-axis and / or Y-axis;

[0034] Alternatively, the magnetic pole arrangement shown in Figure 8(b) can form transverse magnetic fields in four directions o...

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Abstract

The invention provides a voice-coil-motor-driven scanning micro-mirror, which comprises a reflection mirror surface. The reflection mirror surface is driven by a voice coil drive motor. The voice coil drive motor is formed by a Halbach permanent magnet array and an electrified coil. The electrified coil drives the reflection mirror surface to move in a magnetic field formed by the Halbach permanent magnet array. According to the voice-coil-motor-driven scanning micro-mirror, the Halbach permanent magnet array has the characteristic of a magnetic monopole and can realize a magnetic self-shielding function of the voice coil motor, thereby reducing electromagnetic interference of the motor on external environment; what's more, the Halbach permanent magnet array can realize the highest-intensity magnetic field with the fewest magnetic bodies, thereby obviously reducing the weight and size of a scanning micro-mirror driving device; and besides, through precise design of the permanent magnet array, directivity and accuracy of micromirror torsion or motion can be further improved, thereby providing infinite possibilities for miniaturization and intelligent development of the scanning micro-mirror terminal product.

Description

technical field [0001] The invention relates to a scanning micromirror, in particular to a scanning micromirror driven by a voice coil motor. Background technique [0002] Scanning micromirrors manufactured by MEMS technology have significant advantages such as small size, low cost, and low power consumption, and can be widely used in optical scanning projection display systems, laser imaging radars, spectrometers, barcode scanners, confocal microscopes, and endoscopes. and other optical instruments. [0003] The driving methods of the scanning micromirror mainly include electrostatic driving and electromagnetic driving. Among them, the electrostatic drive mainly uses the capacitance change between the electrodes to generate electrostatic force, thereby driving the micromirror to move around the axis. Electrostatically driven micromirrors are divided into two types: plate capacitive and comb-tooth driven. In comparison, comb-tooth electrostatically driven micromirrors can ...

Claims

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Application Information

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IPC IPC(8): G02B26/08
CPCG02B26/085
Inventor 赵照
Owner XINFOO SENSOR TECH CO LTD
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