A kind of high solid content nanometer spherical silica polishing film and preparation method thereof
A spherical silica, high solid content technology, used in manufacturing tools, metal processing equipment, abrasives, etc., can solve problems such as unspecified modification treatment
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Embodiment 1
[0020] Tetraethyl orthosilicate (TEOS) is used as raw material, ammonia water is used as catalyst, and ethanol is used as co-solvent. First, weigh 225ml of absolute ethanol, 150ml of ammonia water and 30ml of ultrapure water respectively, stir gently with a magnetic stirrer for 15min in a three-necked flask and mix evenly, then quickly add 17.5ml of TEOS into the above reaction solution, stir at 60°C for 2h, and then Centrifuge, wash with water and ethanol for 5 times, and finally dry in vacuum at 110° C. for 24 hours, and grind to obtain silica nanoparticles.
[0021] Dry the silica nanoparticles prepared above in a vacuum oven at 100°C for 24 hours, then weigh 55 g of the dry powder and place it in a single-necked flask, and add 30 g of cyclohexane, y-methacryloyloxypropyl trimethyl Oxysilane 7.5g, n-propylamine 7.5g, the obtained mixture was dispersed by ultrasonic vibration for 10min, stirred at 25°C for 30min, then placed in a rotary evaporator and evaporated for 10min un...
Embodiment 2
[0028] Tetraethyl orthosilicate (TEOS) is used as raw material, ammonia water is used as catalyst, and ethanol is used as co-solvent. First, weigh 225ml of absolute ethanol, 150ml of ammonia water and 30ml of ultrapure water respectively, stir gently with a magnetic stirrer for 15min in a three-necked flask and mix evenly, then quickly add 17.5ml of TEOS into the above reaction solution, stir at 60°C for 2h, and then Centrifuge, wash with water and ethanol for 5 times, and finally dry in vacuum at 110° C. for 24 hours, and grind to obtain silica nanoparticles.
[0029] Dry the silica nanoparticles prepared above in a vacuum oven at 100°C for 24 hours, then weigh 55 g of the dry powder and place it in a single-necked flask, and add 30 g of cyclohexane, y-methacryloyloxypropyl trimethyl Oxysilane 7.5g, n-propylamine 7.5g, the obtained mixture was dispersed by ultrasonic vibration for 10min, stirred at 25°C for 30min, then placed in a rotary evaporator and evaporated for 10min un...
Embodiment 3
[0033] Tetraethyl orthosilicate (TEOS) is used as raw material, ammonia water is used as catalyst, and ethanol is used as co-solvent. First, weigh 225ml of absolute ethanol, 150ml of ammonia water and 30ml of ultrapure water respectively, stir gently with a magnetic stirrer for 15min in a three-necked flask and mix evenly, then quickly add 17.5ml of TEOS into the above reaction solution, stir at 60°C for 2h, and then Centrifuge, wash with water and ethanol for 5 times, and finally dry in vacuum at 110° C. for 24 hours, and grind to obtain silica nanoparticles.
[0034] Dry the silica nanoparticles prepared above in a vacuum oven at 100°C for 24 hours, then weigh 55 g of the dry powder and place it in a single-necked flask, and add 30 g of cyclohexane, y-methacryloyloxypropyl trimethyl Oxysilane 7.5g, n-propylamine 7.5g, the obtained mixture was dispersed by ultrasonic vibration for 10min, stirred at 25°C for 30min, then placed in a rotary evaporator and evaporated for 10min un...
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