Fast gas-cooling vacuum furnace
A vacuum furnace and air-cooling technology, which is applied in the field of rapid air-cooled vacuum furnaces, can solve the problems of unreasonable system circuit design, slow cooling speed, and ineffective recovery.
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[0014] The rapid air-cooled vacuum furnace of the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0015] As shown in the figure, the rapid air-cooled vacuum furnace of the present invention includes a vacuum heating chamber 1 and a gas storage tank 2, and a heating element 19 is fixedly arranged in the vacuum heating chamber 1, and the heating element 19 is sealed in the vacuum heating chamber 1 through a sealed insulating sleeve. Inside, the upper part of the vacuum heating chamber 1 is connected to the suction port of a vacuum pump 4 through the vacuum valve 3, and the exhaust port (A port) of the vacuum pump 4 is connected to a three-way device 5, and the said three-way device 5 can be three-way The three-way valve can also be a three-way structure composed of other components. One end (C port) of the three-way valve 5 is connected to the gas storage tank 2, and the other end (B port) of th...
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