Large-area optical profile measurement device and method based on dual-wave interference fringe array
An interference fringe and profile measurement technology, applied in measurement devices, optical devices, instruments, etc., can solve problems such as slow measurement speed, and achieve the effect of broad application prospects
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[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0033] like figure 1 Shown is a schematic structural diagram of a large-area optical profilometer based on a dual-wavefront interference fringe array of the present invention. The large-area optical profilometry device based on the dual-wavefront interference fringe array of the present invention includes:
[0034] Semiconductor laser 1, used to emit coherent laser light;
[0035] Lens 2, used to receive and convert the coherent laser light emitted by the semiconductor laser;
[0036] The parallel plate group is used to receive and transform the light beam converted by the lens, and project the ...
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