Absolute type grating ruler and measurement method

A measurement method and technology of grating ruler, which are applied in the direction of transmitting sensing components by optical devices, can solve the problems of limited coding range, high code error rate, measurement error, etc., so as to reduce the grating error rate, high measurement accuracy, and The effect of manufacturing cost

Inactive Publication Date: 2016-08-31
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the main disadvantage of the absolute grating ruler is that it is slow in high-precision measurement, and the error rate is high when decoding. Moreover, the distance between the grid lines on the code track of the current absolute grating scale is very small, and the higher the precision required, the grid lines The

Method used

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  • Absolute type grating ruler and measurement method
  • Absolute type grating ruler and measurement method
  • Absolute type grating ruler and measurement method

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Embodiment 1

[0053] Example 1 reference figure 1 and figure 2 , an absolute grating ruler, including a parallel light source module 1, a scale grating 2, a photodetector 3 and a signal processing module 4, a base track 10 and a plurality of coding tracks are arranged on the scale grating 2, and the base track 10 includes a Grating stripes with inclined directions, each coding track includes a plurality of grating stripes that are uniformly arranged periodically and inclined to the measurement direction, and each coding track has a different period respectively, and the parallel light beam emitted by the parallel light source module 1 passes through the scale After the grating 2 is irradiated onto the photodetector 3, the photodetector 3 is used to collect the arriving optical signal and convert it into a measurement electrical signal before sending it to the signal processing module 4, which is used to process and analyze the measurement electrical signal The measured values ​​of multipl...

Embodiment 2

[0066] Embodiment 2, a method of measuring an absolute grating ruler, comprising steps:

[0067] S1. Install the scale grating 2 on the object to be measured, and drive the object to be measured to move;

[0068] S2. The parallel light beam emitted by the parallel light source passes through the scale grating 2 and then irradiates on the photodetector 3;

[0069] S3. The photodetector 3 collects the arriving optical signal and converts it into a measurement electrical signal and sends it to the signal processing module 4;

[0070] S4. The signal processing module 4 analyzes and obtains the measured values ​​of the base track 10 and multiple encoded tracks after processing the measured electrical signals, and then calculates and obtains the absolute position measured values, specifically including steps S41 to S43:

[0071] S41. After the signal processing module 4 preprocesses the measurement electrical signal, it divides and obtains a plurality of measurement image blocks corr...

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Abstract

The invention discloses an absolute type grating ruler and a measurement method thereof. The absolute type grating ruler comprises a parallel light source module, a scale grating, a photoelectric detector and a signal processing module; the scale grating is provided with a basic track and a plurality of coding tracks; the basic track comprises a grating stripe which is inclined relative to the measurement direction; each coding track comprises a plurality of grating stripes which are uniformly and periodically arranged and inclined relative to the measurement direction; each coding track has a different period; parallel light beams emitted by the parallel light source module are radiated to the photoelectric detector after passing through the scale grating; the photoelectric detector is used for collecting arrival light signals and transmitting the measurement electric signals to the signal processing module after converting the arrival light signals to measurement electric signals ; and the signal processing module is used for obtaining measurement values a plurality of the coding tracks after performing processing and analyzing on the measurement electric signals and then obtaining the absolute position measurement value through calculation. The absolute type grating ruler and the measurement method are low in etching difficulty, reduce the manufacture cost, have high measurement accuracy and can be applicable to the grating measurement industry.

Description

technical field [0001] The invention relates to the field of grating ruler measurement, in particular to an absolute grating ruler and a measuring method thereof. Background technique [0002] At present, the commonly used grating rulers can be divided into three types: incremental grating rulers, semi-absolute grating rulers and absolute grating rulers, which are widely used in the CNC machine tool manufacturing industry. The incremental grating scale is the most commonly used high-precision measuring device. It has an absolute zero mark, and the scale grating is equidistantly distributed thereafter. The reading head moves relative to the scale grating, and the Moiré fringes formed by the passing grid will pass through the electrical signal processing to get the distance relative to absolute zero. This measurement mode is simple and easy to implement, but in use, it is difficult to greatly improve the work efficiency because it must be recalibrated every time it returns to...

Claims

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Application Information

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IPC IPC(8): G01D5/34
CPCG01D5/34
Inventor 王晗柴宁陈新陈新度巫孟良廖剑祥黄明辉李彬韩锦张芳健
Owner GUANGDONG UNIV OF TECH
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