MEMS magnetic tuning YIG band pass filter and manufacturing method

Abstract

The invention discloses an MEMS magnetic tuning YIG band pass filter and a manufacturing method. The band pass filter comprises a resonant cavity, and a rectangular matrix horizontally placed in the resonant cavity; the resonant cavity comprises an RF input terminal and an RF output terminal; the matrix is horizontally provided with two coupling holes, in which YIG small balls are arranged; the front surface of the matrix is provided with metal lines; when ferromagnetic resonance conditions are met, microwave radiofrequency signals enter from an input output terminal U-shaped metal line, and is outputted from another input output terminal U-shaped metal line; two parallel temperature compensation resistors are parallelly printed on the matrix. The technical scheme realizes miniaturization and compactness of a YIG resonant coupling structure, and controllable and high process precision, greatly reduces the size, weight and power consumption of the magnetic tuning YIG band pass filter, increases a tuning speed, and breaks through the bottlenecks of poor consistency and low adjustment efficiency of the device caused by the human factor of manual procedures.

Description

technical field [0001] The invention relates to a filter and a manufacturing method, in particular to a MEMS magnetic tuning YIG bandpass filter and a manufacturing method. Background technique [0002] Magnetically tuned YIG bandpass filter is a very important electronic component, which has broad application prospects in civilian equipment and military electronic warfare. Magnetically tuned YIG bandpass filters are usually used as preselectors for wideband receivers, and can perform functions such as wideband reconnaissance, panoramic reception, spectrum analysis, and passive positioning. With the help of magnetically tuned YIG bandpass filter, it can automatically search, track, and gate the desired frequency signal among numerous dense and complex electromagnetic signals, and suppress irrelevant or interfering signals. Due to the wide tuning range, high out-of-band rejection, and good tuning linearity, compared with other technical approaches, the use of magnetically tu...

AI Technical Summary

Problems solved by technology

[0004] The disadvantage of the traditional magnetically tuned YIG bandpass filter is that the realization of the multi-level orthogonal global resonant coupling structure can only rely on manual technology, especially the YIG ball installation and orthogonal Coupling coil winding and welding can only be done manually under a microscope

In this traditional method, the YIG ball needs to be bonded to the top of the beryllium ceramic rod and inserted into the coupling hole from the side, and the position is difficult to achieve a high degree of accuracy.

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