Quartz vessel carburizing device and method used for preparation of high-purity material
A technology for carburizing devices and vessels, which is applied in the field of carburizing devices for quartz vessels made of high-purity materials. The effect of production costs
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[0017] The present invention will be further described below in conjunction with specific embodiments, but the protection scope of the present invention is not limited thereto.
[0018] See figure 1 with figure 2 , The present invention provides a technical solution for a quartz ware carburizing device for the preparation of high-purity materials: a quartz ware carburizing device for the preparation of high-purity materials, comprising a first high-purity quartz tube 1 and a second high-purity quartz tube The quartz tube 10, the first high-purity quartz tube 1 is installed in a high-temperature heating furnace 4, and the first high-purity quartz tube 1 is provided with a carburized quartz vessel 3, and the upper end of the first high-purity quartz tube 1 is installed There is a first sealing device 2, the first sealing device 2 is connected to a first pressure gauge 5 and a three-way valve 7 through a pipeline, the second high-purity quartz tube 10 is installed in a temperature-...
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