Tubular pecvd graphite boat process point dismantling device
A dismantling device, graphite boat technology, applied in metal material coating process, sustainable manufacturing/processing, final product manufacturing, etc., can solve the problems of frequent repairs and maintenance, large manual workload, low disassembly efficiency, etc., to save The effect of manpower, improving dismantling efficiency, and improving labor productivity
Active Publication Date: 2018-09-07
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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Problems solved by technology
[0004] The technical problem to be solved by the present invention is: in order to overcome the comparatively frequent repair and maintenance of the tubular PECVD graphite boat in the prior art, the length of the graphite boat has many process points, if only relying on manual disassembly, the manual workload is very large, and the disassembly efficiency is low Low problem, provide a tubular PECVD graphite boat process point disassembly device
Method used
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[0025] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0026] Such as figure 1 and figure 2 A kind of tubular PECVD graphite boat process spot removal device shown, comprises base 15, is provided with two parallel guide rails 12 on base 15, and screw mandrel 11 is installed on the base 15 in rotation, and screw mandrel 11 is driven to rotate by motor 13, and screw mandrel 11 is rotated by motor 13, and The rod 11 is driven to install the slide block, and the bottom plate 1 is fixedly installed on the slide block, such as image 3 shown. The two base plates 1 are installed at intervals, the base plate 1 is fixedly installed with a mounting block 2, and the mounting block 2 is provided with a right-angle openin...
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The invention relates to a demounting device for process points of a tube type PECVD graphite boat. The demounting device comprises a graphite boat conveying device, a process point pushing-out device and a process point storing device. The process point pushing-out device is arranged over the graphite boat conveying device. The process point storing device is detachably installed under the graphite boat conveying device. The demounting device comprises a graphite boat fixing clamp and a moving device driving the graphite boat fixing clamp to move. After the graphite boat provided with the process points is installed and fixed to the graphite boat fixing clamp, the moving device is used for moving the fixed graphite boat to the position under a guide plate. The guide plate moves downwards to make contact with the upper surfaces of the process points on the graphite boat through a lifting device, and finally, the process points are pushed out of process holes of the graphite boat through the process point push-out device. All the processes are automatically completed through a machine, labor force is saved, the demounting efficiency is improved, and the labor productivity is improved.
Description
technical field [0001] The invention relates to the technical field of solar battery sheet manufacturing, in particular to a tubular PECVD graphite boat process point dismantling device. Background technique [0002] In the manufacturing process of solar cells, when the silicon wafer is coated on its surface, it is necessary to insert the uncoated silicon wafer into the carrier of the PECVD vacuum coating equipment. At present, the carrier usually uses such as Figure 8 The graphite boat shown, the specific operation process is: the silicon chip is inserted into the graphite boat and positioned on it through the graphite boat process point, then, the graphite boat loaded with the silicon chip is placed in the PECVD vacuum coating equipment, and the PECVD process is used for the graphite boat. Silicon wafers are coated. [0003] The existing graphite boat process points are mainly composed of a block and a cylindrical installation part for installation in the installation hol...
Claims
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IPC IPC(8): C23C16/458H01L21/67H01L21/673H01L31/18
CPCC23C16/458H01L21/67011H01L21/673H01L31/18Y02P70/50
Inventor 邹海军吴佳俊吴俊王少华
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD