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Vacuum heat treatment process for sealing of glass and Kovar alloy

A technology of vacuum heat treatment and glass sealing, which is applied in the field of metal and glass sealing, and can solve problems such as poor degassing effect and hydrogen permeation on the metal surface

Inactive Publication Date: 2016-10-12
洛阳新巨能高热技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The degassing effect of the traditional "hydrogen burning" treatment is poor, and there is a problem of hydrogen permeation on the metal surface

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] The glass sealing kovar alloy vacuum heat treatment process of the present invention comprises the following steps:

[0014] 1. Cleaning: Soak the Kovar alloy in water with metal cleaning agent at 40°C for 20 minutes.

[0015] 2. Drying: The surface of the cleaned Kovar alloy is dried in an oven at a temperature of 80°C.

[0016] 3. Process program setting: solenoid valves are installed at the inlet and outlet ends of the vacuum furnace, and the vacuum state is monitored and controlled through vacuum gauges and vacuum gauges. When the vacuum in the furnace is lower than the lower limit of the vacuum range, the valve at the inlet end is closed, and the valve at the outlet end is opened for vacuuming; when the vacuum reaches the upper limit of the vacuum range, the valve at the outlet end is closed, the valve at the inlet end is opened, and hydrogen is charged, so to loop. The upper limit of vacuum is 500Pa, and the lower limit of vacuum is 3000Pa.

[0017] 4. Heat tre...

Embodiment 2

[0019] The glass sealing kovar alloy vacuum heat treatment process of the present invention comprises the following steps:

[0020] 1. Cleaning: Soak the Kovar alloy in water with metal cleaning agent at 50°C for 25 minutes.

[0021] 2. Drying: The surface of the cleaned Kovar alloy is dried in an oven at a temperature of 90°C.

[0022] 3. Process program setting: solenoid valves are installed at the inlet and outlet ends of the vacuum furnace, and the vacuum state is monitored and controlled through vacuum gauges and vacuum gauges. When the vacuum in the furnace is lower than the lower limit of the vacuum range, the valve at the inlet end is closed, and the valve at the outlet end is opened for vacuuming; when the vacuum reaches the upper limit of the vacuum range, the valve at the outlet end is closed, the valve at the inlet end is opened, and hydrogen is charged, so to loop. The upper limit of vacuum is 700Pa, and the lower limit of vacuum is 4000Pa.

[0023] 4. Heat tre...

Embodiment 3

[0025] The glass sealing kovar alloy vacuum heat treatment process of the present invention comprises the following steps:

[0026] 1. Cleaning: Soak Kovar alloy in water with metal cleaning agent and temperature at 60°C for degreasing treatment for 0 minutes.

[0027] 2. Drying: The surface of the cleaned Kovar alloy is dried in an oven at a temperature of 100°C.

[0028] 3. Process program setting: solenoid valves are installed at the inlet and outlet ends of the vacuum furnace, and the vacuum state is monitored and controlled through vacuum gauges and vacuum gauges. When the vacuum in the furnace is lower than the lower limit of the vacuum range, the valve at the inlet end is closed, and the valve at the outlet end is opened for vacuuming; when the vacuum reaches the upper limit of the vacuum range, the valve at the outlet end is closed, the valve at the inlet end is opened, and hydrogen is charged, so to loop. The upper limit of vacuum is 1000Pa, and the lower limit of v...

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PUM

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Abstract

A glass-sealed Kovar alloy vacuum heat treatment process, comprising the following steps: heat-treating 4J29 Kovar alloy in a vacuum furnace, adopting a vacuum hydrogen oscillation method during the treatment process, that is, when the vacuum reaches the upper limit of the vacuum range, the vacuum is evacuated Stop and feed hydrogen; when the ventilation reaches the lower limit of the vacuum range, stop the ventilation and start vacuuming, and so on. This heat treatment process can effectively purify the alloy surface, eliminate stress, and stabilize the expansion coefficient. It is obviously superior to the traditional "hydrogen burning" treatment on the degassed surface, and there is no danger of hydrogen penetration.

Description

technical field [0001] The invention belongs to the technical field of metal and glass sealing, in particular to a vacuum heat treatment process for glass sealing Kovar alloy. Background technique [0002] With the rapid development of the electronics industry, the sealing technology of glass and metal is more and more widely used in the fields of electronic components, semiconductor devices, etc., and the sealing materials and sealing forms are also increasing. Among them, Kovar alloy and glass are mostly sealed. [0003] The mechanism of glass sealing is to rely on the metal oxide generated on the metal surface to firmly adhere to the metal surface and at the same time dissolve into the molten glass, thereby achieving the sealing of glass and metal. The purification treatment of metal parts can provide a good basis for the growth of surface oxide film. If the surface is not treated well, a large number of air bubbles will be generated at the seal during sealing, causing a...

Claims

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Application Information

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IPC IPC(8): C21D1/773
Inventor 高学昆丁超郭帅
Owner 洛阳新巨能高热技术有限公司
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