Laser Feedback Interferometer with Quasi-Global Compensation
A technology of laser feedback and interferometer, which is applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problems that the reference light cannot return to the laser to form a feedback, the adjustment of the optical path is difficult, and it is unfavorable for practical application, so as to ensure the accuracy and resolution of displacement measurement rate, avoiding crosstalk, and compensating for dead-range errors
Active Publication Date: 2018-12-11
TSINGHUA UNIV
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Problems solved by technology
Since the reference light is not vertically incident on the reference mirror, the slight angular deviation of the reference mirror will prevent the reference light from returning to the laser to form feedback
It is difficult to adjust the optical path, which is not conducive to practical application
Method used
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[0016] The quasi-global compensation laser feedback interferometer provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0017] see figure 1 , the laser feedback interferometer of quasi-full range compensation provided by the embodiment of the present invention includes a laser module 1, a beam splitter 2, a frequency shift module 3, a converging lens 4, a first diverging lens 5, a collimator Module 6, a reference mirror 7, a photoelectric detection module 8 and a signal processing system 9.
[0018] The laser module 1 is used to output two parallel laser beams in the same direction. In this embodiment, the laser module 1 includes a first laser 11 and a second laser 12 arranged at intervals, and the laser output directions of the first laser 11 and the second laser 12 are parallel and in the same direction. The first laser 11 and the second laser 12 can be full-cavity, half-cavity or full-cavity respectively, solid...
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The invention provides a quasi full compensation laser feedback interferometer. The quasi full compensation laser feedback interferometer comprises a laser module outputting two laser beams which are in the same direction and are parallel, a light splitter used for transmitting the two beams of laser outputted by the laser module into first transmission light and second transmission light, a sound-light frequency shift module used for carrying out frequency shift of the first transmission light and the second transmission light, a gathering lens used for gathering the first transmission light and the second transmission light, a first diverging lens used for separating the first transmission light and the second transmission light after gathering, a collimation module used for collimating the first transmission light and the second transmission light after separation and making the first transmission light and the second transmission light after separation be parallel, a reference lens used for reflecting the first transmission light to return to a first laser device along an original path, a photoelectric detection module used for converting first reflection light and second reflection light into electric signals, and a signal processing system used for processing the electric signals inputted by the photoelectric detection module, wherein the second transmission light is reflected by a to-be-measured target to return to a second laser device along an original path. Through the quasi full compensation laser feedback interferometer, displacement of the remote distance to-be-measured target can be accurately measured.
Description
technical field [0001] The invention relates to a laser feedback interferometer, in particular to a laser feedback interferometer with a quasi-full range compensation structure for non-contact precision displacement measurement of non-cooperating targets. Background technique [0002] Laser feedback interferometer is based on the principle of frequency-shifted optical feedback, combined with heterodyne phase measurement technology, it can realize high-resolution displacement measurement of non-cooperating targets. However, the feedback external cavity of the feedback interferometer is a dead path. Factors such as air refractive index fluctuations, component deformation caused by temperature changes, and the instability of the laser itself will cause the phase drift of the external cavity of the feedback light, which seriously affects the displacement measurement. Resolution and Accuracy. Especially when the interferometer cannot get close to the target to be measured, the o...
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IPC IPC(8): G01B9/02
CPCG01B9/02007G01B9/02027
Inventor 张书练徐玲
Owner TSINGHUA UNIV