Thermal resistance-type thin film thermopile-type transient heat flow meter and manufacturing method

Abstract

The invention provides a thermal resistance-type thin film thermopile-type transient heat flow meter and a manufacturing method. The heat flow meter comprises a ceramic substrate, and a positive thermocouple, a negative thermocouple, a thermocouple connection layer, an outer thermal resistance layer and an inner thermal resistance layer arranged on the ceramic substrate, wherein the positive thermocouple and the negative thermocouple are in butt joint via the thermocouple connection layer; the outer thermal resistance layer and the inner thermal resistance layer cover the positive thermocouple and the negative thermocouple; when an external environment applies heat flow in a vertical direction to the heat flow meter, the outer thermal resistance layer and the inner thermal resistance layer have different thicknesses, the positive thermocouple and the negative thermocouple are connected to form hot and cold junctions, a temperature difference exists between adjacent two hot and cold junctions, corresponding electric potential output exists according to Seebeck effects, and the output electric potential is related to the heat flow density. Transient measurement on the heat flow density can be realized, and the thermal resistance-type thin film thermopile-type transient heat flow meter has the advantages of simple structure, small size, few influences on a measured field, quick response speed, large measurement temperature range and high measurement precision.

Description

technical field [0001] The invention relates to a heat flow meter in the field of micro-electromechanical technology, in particular to a thermal resistance film thermopile transient heat flow meter and a preparation method thereof. Background technique [0002] Nowadays, in industrial and agricultural production, scientific research, aerospace, power engineering and daily life, there are a lot of heat transfer problems to be solved. With the rapid development of modern science and technology, it is far from enough to only use temperature as the only information for heat transfer. Therefore, more and more attention has been paid to the theory and technology of heat flow detection, and the research and use of heat flow probes and heat flow meters, which are sensors for measuring heat flow, have become more extensive. The thermal resistance heat flow meter is suitable for the measurement of steady-state heat flow, and the thin-film heat flow meter is suitable for the measureme...

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Problems solved by technology

"The design is a heat flow meter based on a temperature sensor, which has the disadvantages of large volume, complex structure, slow response speed, and high price.

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