Sequential ICP optical emission spectrometer and method for correcting measurement wavelength

Abstract

The present disclosure provides a sequential inductively coupled plasma (ICP) optical emission spectrometer and a method for correcting measurement wavelength, which does not require a mechanism for mechanically moving a detector of a spectroscope or a temperature control mechanism of an optical splitter. The ICP optical emission spectrometer operates to perform based on a shift amount (time dependency) of a wavelength peak position according to time elapse of a reference wavelength obtained as a result of continuously measuring a plurality of emission lines of argon having different wavelengths as the reference wavelength and a per-wavelength shift amount (wavelength dependency) of the reference wavelength. A controller (40) calculates a correction amount of a diffracting grating (22a) as which a shift amount of a wavelength peak of each measured wavelength which is set when detection lines of a detected object element are generated relative to the initial position, and performs measurement wavelength correction for correcting the movement position of the diffracting grating (22a) corresponding to the wavelength peak position of the measurement wavelength relative to the initial position.

Description

technical field [0001] The present invention relates to a sequential ICP emission spectroscopic analysis device and a measurement wavelength correction method for introducing a sample into an inductively coupled plasma (ICP) and performing qualitative / quantitative analysis of elements contained in the sample. Background technique [0002] An ICP emission spectrometer is used for qualitative / quantitative analysis of elements contained in a sample. In the ICP emission spectrometer, a spectrometer is used that introduces gas such as argon and a sample solution into a plasma torch, generates plasma by applying high frequency, and splits the generated plasma light. [0003] The plasma light is split into wavelengths specific to the element by a spectrometer, and the emission intensity at the wavelength is measured by a detector. In order to suppress the drift (drift) of the peak position that may occur due to changes in the diffraction conditions corresponding to temperature cha...

AI Technical Summary

Problems solved by technology

However, every time the configuration conditions are changed, it is necessary to conduct confirmation experiments, etc., and the workload is huge, which becomes an excessive constraint on device improvement.

[0010] The technology of Patent Document 2 is limited to a multi-wavelength ICP emission spectrometer

In addition, adjustment of the angle and position of optical elements such as telemetry mirrors requires mechanisms such as actuators, which will lead to increased costs, etc.

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