Low-temperature enrichment and concentration online high-sensitivity quadripole mass spectroscopy analysis system

A high-sensitivity, low-temperature enrichment technology, applied in the analysis of materials, material analysis by electromagnetic means, preparation of test samples, etc., can solve problems such as inability to use, and achieve the effect of improving analytical sensitivity

Inactive Publication Date: 2016-10-12
SOUTHEAST UNIV
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Problems solved by technology

According to the principle, it can be seen that the pressurized concentration method is generally applied to the gas pre-concentration of several atmospheric pressures, and is not suitable for the concentration of trace gases; the solvent extraction method cannot be used in a vacuum environment because the object cannot be a gas in a vacuum environment.

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  • Low-temperature enrichment and concentration online high-sensitivity quadripole mass spectroscopy analysis system

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Embodiment 1

[0022] An online high-sensitivity quadrupole mass spectrometry analysis system for low-temperature enrichment and concentration, including a vacuum pump unit 1, a sample chamber 3, an analysis chamber 5, a quadrupole mass spectrometer 4, a first valve 2-1, a second valve 2-2 and a cryogenic Concentrator 6; wherein, sample chamber 3, first valve 2-1, cryogenic concentrator 6, analysis chamber 5, second valve 2-2 and vacuum pump unit 1 are sequentially connected, and analysis chamber 5 is also connected with quadrupole mass spectrometer 4 connected;

[0023] Vacuum pump unit 1 provides the required vacuum for quadrupole mass spectrometer 4 analysis, and then sample gas is introduced from sample chamber 3 into analysis chamber 5 through cryogenic concentrator 6 for analysis by quadrupole mass spectrometer 4 .

[0024] The cryogenic concentrator 6 includes a concentrator 6-1 made of polymer nanofibers and a temperature controller 6-2, and the temperature controller 6-2 includes a ...

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Abstract

The invention discloses a low-temperature enrichment and concentration online high-sensitivity quadripole mass spectroscopy analysis system which comprises a vacuum pump unit, a sample chamber, an analysis chamber, a quadripole mass spectroscopy, a first valve, a second valve and a low-temperature concentrator. The sample chamber, the first valve, the low-temperature concentrator, the analysis chamber, the second valve and the vacuum pump unit are connected in sequence. The analysis chamber is further connected with the quadripole mass spectroscopy. The vacuum pump unit provides needed vacuum degree for the quadripole mass spectroscopy, then, sample gas in the sample chamber is introduced into the analysis chamber through the low-temperature concentrator and analyzed by the quadripole mass spectroscopy. According to the low-temperature enrichment and concentration online high-sensitivity quadripole mass spectroscopy analysis system, the analysis sensitivity of the quadripole mass spectroscopy for trace impurity gas, particularly organic impurity gas is remarkably improved in the vacuum environment.

Description

technical field [0001] The invention relates to an online high-sensitivity quadrupole mass spectrometry analysis system for low-temperature enrichment and concentration, which belongs to the field of gas analysis. Background technique [0002] Quadrupole mass spectrometers are widely used in the field of analysis of gas components due to their strong resolution, high sensitivity, and fast response, such as the analysis of impurities in ultra-pure gases, the analysis of residual gas components in vacuum electronic devices, and the detection of vacuum systems. leak analysis etc. When analyzing the type and amount of trace gas, due to the limitations of the measurement method and the detection instrument itself, its analytical sensitivity often cannot meet the requirements. Therefore, the method of concentrating the sample gas can improve the analytical sensitivity of the detection instrument. [0003] Commonly used concentration methods are reported as pressurized concentrati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/62G01N1/40G01N1/42
CPCG01N1/40G01N1/42G01N27/62
Inventor 肖梅康学军毛福明
Owner SOUTHEAST UNIV
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