Apparatus for measuring fluorescence lifetime
A fluorescence lifetime and measurement device technology, applied in fluorescence/phosphorescence, material excitation analysis, etc., can solve the problems of inability to measure the doping concentration of solid samples, the inability to measure the spatial distribution of doping concentration, and the limitation of disk thickness
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[0015] Hereinafter, embodiments will be described in more detail with reference to the accompanying drawings. Embodiments are described herein with reference to cross-section illustrations that are schematic illustrations of embodiments (and intermediate structures). As such, deviations from the illustrated shapes are to be expected as a result, for example, of manufacturing techniques and / or tolerances. Thus, embodiments should not be construed as limited to the particular shapes of regions illustrated herein but may be to include deviations in shapes that result, for example, from manufacturing. In the drawings, the lengths and dimensions of layers and regions may be exaggerated for clarity. The same reference numerals in the figures denote the same elements.
[0016] Terms such as 'first' and 'second' may be used to describe various components, but they should not limit the various components. Those terms are used only for the purpose of distinguishing one component from...
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