Electric single photon source device and preparation method thereof
A single-photon source and device technology, applied in the field of electro-induced single-photon source devices and their preparation, can solve the problems of high requirements restricting the development and application of electro-induced single-photon sources, process and experimental equipment, achieve small diameter, avoid process Steps, the effect of reducing the area
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[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0024] An embodiment of the present invention provides an electro-single photon source device, such as Figure 1(a) , 1(b) As shown, the electro-single photon source device includes: a substrate 2; a lower electrode 1 is formed on the lower surface of the substrate 2; a microcolumn structure for generating single photons is formed on the upper surface of the substrate 2; The column filling 8; the ohmic contact layer 9 is formed on the micro column structure and the micro column filling 8, and forms an ohmic contact with the micro column structure; the upper electrode 10 is formed on the ohmic contact layer, and forms an ohmic contact with it. With this structure, since the scale of the ohmic layer is larger than that of ...
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