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A Structure for Improving the Output Displacement and Natural Frequency of a Piezoelectric Flexible Mechanism

A flexible mechanism and displacement technology, applied in piezoelectric devices/electrostrictive devices, etc., can solve problems such as limited effect, achieve large displacement output and frequency response performance, increase output displacement, and improve the effect of natural frequency

Inactive Publication Date: 2018-05-04
GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The common feature of these patents is to improve and improve the performance of the flexible mechanism structurally, but the effect is limited

Method used

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  • A Structure for Improving the Output Displacement and Natural Frequency of a Piezoelectric Flexible Mechanism
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  • A Structure for Improving the Output Displacement and Natural Frequency of a Piezoelectric Flexible Mechanism

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with accompanying drawing:

[0020] Such as figure 1 , figure 2 , image 3 , Figure 4 and Figure 5 As shown, the present invention is a structure for improving the output displacement and natural frequency of a piezoelectric flexible mechanism, including a diamond-shaped flexible mechanism 3, a piezoelectric stack 1, a piezoelectric sheet 2, a displacement sensor 9, a flexible hinge 8, a data acquisition system 12, Power amplifier 10 and controller 11, diamond-shaped flexible mechanism 3 includes flexible beam 4, displacement input end 5, rigid fixed end 6 and rigid output end 7, two displacement input ends 5 are arranged symmetrically, rigid fixed end 6 and rigid output end 7 Symmetrically arranged, the line between the two displacement input ends 5 is perpendicular to the line between the rigid input end and the rigid output end 7, and the four flexible beams 4 are sequentially connected to th...

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Abstract

The invention discloses a structure for improving the output displacement and natural frequency of a piezoelectric flexible mechanism, which includes a diamond-shaped flexible mechanism, a piezoelectric stack, a piezoelectric sheet, a displacement sensor, a data acquisition system, a power amplifier and a controller, and the displacement sensor is arranged on On the rigid output end, a plurality of piezoelectric sheets are respectively fixed at both ends of the flexible beam, the signal output end of the displacement sensor is connected to the signal input end of the data acquisition system, and the signal output end of the data acquisition system is connected to the signal input end of the controller The signal output of the controller is amplified by the power amplifier and then connected to the drive signal input end of the piezoelectric stack / piezoelectric sheet. The present invention generates additional bending moments by pasting piezoelectric sheets, so that the output displacement of the diamond-shaped flexible mechanism is increased without reducing the natural frequency of the flexible mechanism; in addition, thicker flexible beams and flexible hinges can be designed to increase the natural frequency of the flexible mechanism , thus the loss of displacement amplification is compensated by the bending moment provided by the additional piezoelectric sheet.

Description

technical field [0001] The invention relates to the field of precision drive and control, in particular to a structure for improving the output displacement and natural frequency of a piezoelectric flexible mechanism. Background technique [0002] In recent years, with the development of precision machinery technology, especially the emergence of micro-nano technology, science and technology have officially entered the "submicron-nano" era. Electronic, optical, mechanical, and aerospace fields such as scanning electron microscopes, optical instruments, and precision machining are in urgent need of high-precision, high-resolution, and high-speed drive and positioning platforms. Due to the advantages of high resolution, high stiffness and large output, piezoelectric ceramics are widely used in precision drive and control, but the output displacement of piezoelectric ceramics is extremely small, even for stacked piezoelectric ceramics, the output displacement is generally no mo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/09
CPCH10N30/20
Inventor 凌明祥刘谦李思忠黎启胜郑星曹军义
Owner GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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