Full-range image detecting system and method thereof

An image detection and image technology, which is applied in the field of detection system, can solve the problems of affecting the process, the speed of focusing is not fast enough, prolonging the detection time, etc., and achieves the effect of low cost, fast focusing speed and breaking through the bottleneck

Active Publication Date: 2016-11-30
IND TECH RES INST
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Problems solved by technology

Also due to the increase in the amount of warping, when the focus range of the general automatic optical inspection (AOI) system is not large enough and the focus speed is not fast enough, it will make it difficult for the automatic optical measurement system to focus and prolong the detection time. The detection effect is not good, which affects the subsequent process
[0003] In the prior art, the main focusing methods are divided into active focusing and passive focusing. Among

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  • Full-range image detecting system and method thereof
  • Full-range image detecting system and method thereof
  • Full-range image detecting system and method thereof

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[0040] The structural principle and working principle of the present invention will be described in detail below in conjunction with the accompanying drawings:

[0041] The global image detection system and detection method of this embodiment measure the surface topography and relative height distribution of the object to be measured (for example, wafer), and output reference coordinate information (for example, wafer center position, alignment The position and rotation angle of the groove and the resolution of the image, etc.) are used as the movement information of the measurement module (such as an optical microscope or optical interferometer) and the positioning platform to shorten the focusing time and enable the measurement module to quickly measure point by point.

[0042] Taking wafer surface inspection as an example, first measure the relative height distribution of the surface topography of the wafer, and provide the relative height and reference coordinate information of ...

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Abstract

A full-range image detecting system including a planar light source, an image capturing device, a light sensing device, a processing unit and a measuring module is provided. The planar light source projects a photo image with periodical variations onto an object to be detected. The image capturing device captures a reflective photo image reflected from the object. The light sensing device detects the coordinates of at least three measuring points on the object for fitting a plane. The processing unit calculates a phase variation of the reflective photo image after phase shift, a relative altitude of the surface profile of the object according to the phase variation, and an absolute altitude of the surface profile of the object with respect to the plane to obtain information of absolute coordinate. The measuring module detects the surface of the object according to the information of absolute coordinate of the object.

Description

technical field [0001] The invention relates to a detection system, in particular to a global image detection system and a detection method thereof. Background technique [0002] With the trend of wafer thinning, wafer warpage can reach millimeter (mm) level. Also due to the increase in the amount of warping, when the focus range of the general automatic optical inspection (AOI) system is not large enough and the focus speed is not fast enough, it will make it difficult for the automatic optical measurement system to focus and prolong the detection time. The detection effect is not good, which affects the subsequent process. [0003] In the prior art, the main focusing methods are divided into active focusing and passive focusing. Among them, the passive focusing uses two stages of coarse adjustment and fine adjustment to find the focus, and the active focusing uses the light generated by the light source to pass through the focusing grating. The projection is projected on...

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Application Information

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IPC IPC(8): G01B11/16G01B11/30G01N21/88G01N21/95
CPCG01B11/167G01B11/30G01N21/8806G01N21/9501G01N2021/8829G06T7/521G01C3/32G02B7/285G06T2207/10056G06T2207/30148H04N23/56
Inventor 王浩伟陈俊贤黄仲宁张柏毅
Owner IND TECH RES INST
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