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Multilayer film neutral gray scale density filter and manufacturing method thereof

一种中性灰度、多层膜的技术，应用在光学、滤光片、光学元件等方向，能够解决易产生鬼影等问题，达到效果好、反射率低、光线平衡衰减好的效果

Active Publication Date: 2016-11-30
JILIN YANGTIAN PHOTOELECTRIC CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the high reflectivity, it is easy to produce ghost images and other phenomena during use.

Method used

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  • Multilayer film neutral gray scale density filter and manufacturing method thereof
  • Multilayer film neutral gray scale density filter and manufacturing method thereof
  • Multilayer film neutral gray scale density filter and manufacturing method thereof

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Embodiment Construction

[0030] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0031] The neutral gray-scale light reduction filter of multi-layer film layer comprises a substrate, and several layers of film layers are coated on the substrate, and the film layer includes laminated anti-reflection films and metal films, and at least A layer of anti-reflection film, and a multi-layer anti-reflection film may also be provided between two adjacent metal films, and the refractive index of the constituent material of the anti-reflection film is greater than 1.30.

[0032] Preferably, the constituent material of the anti-reflection film includes at least one selected from Al 2 o 3 , AlF 3 , BeO, CaF 2 , CeF 3 , CeO 3 、Cr 2 o 3 、Dy 2 o 3 、Gd 2 o 3 , HfO 2 、Ho 2 o 3 、In 2 o 3 、LaF 3 , MgF 2 , MgO, N...

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Abstract

The present invention provides a multilayer film neutral gray scale density filter and a manufacturing method thereof. The filter comprises a substrate, the substrate is plated with a plurality of layers of films, the films include overlapped antireflection films and metal films, and at least one layer of the antireflection film is arranged between two adjacent metal films, wherein the refractive index of the forming materials of the antireflection film is larger than 1.30. The manufacturing method comprises the steps: (1) a film-coating umbrella is installed at the top of the chamber body of a vacuum chamber, a power source is arranged at the rotation axis of the film-coating umbrella, two film-coating material sources are arranged at the bottom of the chamber body of the vacuum chamber, a correction board is fixed in the vacuum chamber, the one end of the correction board is located at the same side of the two film-coating material sources, and a vacuum pump is employed to pump the vacuum chamber to be a presetting vacuum degree; and (2) the power sources drive the rotation of the film-coating umbrella, the two film-coating material sources are employed to alternately evaporate the films, and the films are overlapped in order according to a presetting optical thickness and a presetting order.

Description

[0001] This application is a divisional application of a patent application with an application date of June 23, 2014, an application number of 201410283093.3, and an invention title of "a multi-layer neutral gray-scale light reduction filter and its manufacturing method". technical field [0002] The invention relates to a neutral gray scale light reduction filter, in particular to a neutral gray fixed value light reduction filter and a neutral gray gradient light reduction filter with multi-layer film layers and a manufacturing method thereof. Background technique [0003] The neutral gray filter is an energy splitting element for balanced attenuation of light. It is mainly used to filter light in photography and video recording. It has the advantages of simple structure and wide wavelength range. The neutral gray filter includes a neutral density filter (Neutral Density Filter, ND filter for short) and a graduated neutral density filter (Graduated Neutral Density Filter, G...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20G02B1/113G02B1/115
CPCG02B1/113G02B1/115G02B5/205
Inventor 孙义昌
Owner JILIN YANGTIAN PHOTOELECTRIC CO LTD
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