The invention relates to a photoetching projection objective environment collection
control system and a control method thereof, belonging to the field of photoetching projection objective control. The photoetching projection objective environment collection
control system comprises a control
machine box, a collection driving
machine box, an analog-to-
digital conversion machine box, multiple actuators and multiple sensors, wherein an
optical fiber communication board card is connected with an environmental
control algorithm board card through an
optical fiber transmission link; an environment collection driving board card is connected with an analog-to-
digital conversion board card or an interface conversion card through a
digital signal transmission link, and the environment collection driving board card is connected with the multiple actuators through a driving
signal transmission link; the analog-to-
digital conversion board card is connected with the multiple sensors through a low-
voltage analog signal transmission link; the multiple actuators are arranged in a photoetching machine environment cabinet; the multiple sensors are arranged on a photoetching projection objective. According to the photoetching projection objective environment collection
control system disclosed by the invention, the regulation time of every regulation is shortened, the accuracy of environmental parameter regulation is ensured, the
response time is shortened and the integral property of the photoetching projection objective and a photoetching machine can be ensured.