Graphite boats and graphite boats for solar silicon wafer coating

Abstract

The invention discloses a graphite boat piece for solar silicon wafer coating and a graphite boat. A plurality of holes penetrating through the graphite boat piece are formed in the graphite boat piece, four corners of a solar silicon wafer fixed to the graphite boat piece in a back-to-back mode can be adsorbed through the holes in the vacuum coating process of the solar silicon wafer, and therefore the four corners of the solar silicon wafer on the graphite boat piece can be firmly adsorbed on the graphite boat piece, the phenomena of corner chromatic aberration and diffraction caused by surface unevenness and even partial upwarp happening to the solar silicon wafer fixed to the graphite boat piece due to the fact that the surface and sticking point of the graphite boat piece are partially abraded in the coating process of the solar silicon wafer are effectively avoided, and a good guarantee is provided for forming uniform film layers on the silicon wafer.

Description

technical field [0001] The invention relates to the technical field of solar cell production tools, in particular to a graphite boat for solar silicon wafer coating and a graphite boat. Background technique [0002] Solar energy is a clean, efficient and inexhaustible new energy source, and it is one of the important renewable energy sources. With the development of the solar industry, more customers and solar cell manufacturers are paying more and more attention to the color difference of the appearance of cells. In recent years, a lot of research has been done on the appearance and chromatic aberration of photovoltaic cells at home and abroad. The results show that: the silicon wafer coating carrier is graphite material, and the graphite boat is used repeatedly, and the appearance problem is easily caused by the graphite boat. To expand, the biggest influence on the problem of color difference in appearance is the stuck point state of the solar silicon wafer fixed by the ...

AI Technical Summary

Problems solved by technology

In the actual production process of photovoltaic cells, graphite boats are frequently used, and the stuck points of fixed solar silicon wafers and the positions that are in contact with the four corners of solar silicon wafers are most susceptible to wear and tear. Under such frequent use conditions, the existing The surface wear of the graphite boat and stuck points will expand, and the problem of color difference in appearance will continue to extend after continued use, eventually resulting in unqualified color difference and diffraction phenomena in the appearance of silicon wafers, resulting in the production of silicon wafers that cannot be normally put on the market for use

[0003] In addition, since the existing solar silicon wafer coating tools use ordinary graphite boats and stuck points, during the use of solar graphite boats, the graphite boats and stuck points need to be cleaned periodically with acid. As a result, the surface morphology of qualified graphite boats and stuck points shipped by graphite boat manufacturers is constantly damaged during actual use, especially for the frequent use of graphite boats and stuck points, resulting in graphite The boats and stuck points are in a state of wear and pickling for a long time, and the surface of graphite boats and stuck points is constantly rubbed and corroded, resulting in a large number of bad appearance and color differences in the battery. Later, silicon chips with different appearance and color differences are mixed on the same component, resulting in The color difference of the appearance of the battery is more serious, resulting in poor appearance of the battery sheet and components, causing huge losses to the production company

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