Measuring device and method for vacuum sealing performance

A technology of vacuum sealing and measuring device, applied in measuring device, liquid/vacuum degree for liquid tightness measurement, fluid tightness test, etc. Leak rate measurement, the effect of simplifying the leak rate measurement device

Active Publication Date: 2016-12-14
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

In order to improve the accuracy of leak calibration, the device needs to be equipped with a complex and precise gas distribution system to provide standard flow and leak ...

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  • Measuring device and method for vacuum sealing performance
  • Measuring device and method for vacuum sealing performance
  • Measuring device and method for vacuum sealing performance

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Embodiment Construction

[0028] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0029] The invention proposes a vacuum sealing performance measuring device and method for a sealed container, which is used for 10 -6 Pam 3 / s~10 -11 Pam 3 Accurate measurement of the leak rate of vacuum-sealed containers in the / s range. The vacuum sealing performance measuring device of the airtight container that this patent involves is as figure 1 As shown, it mainly includes the first standard leak hole 1, the second stan...

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Abstract

The invention discloses a measuring device and method for a vacuum sealing performance. The device comprises a first standard leaking hole (1), a second standard leaking hole (2), a third standard leaking hole (3), a getter pump (4), a sealed container (5), an angle valve (6), a current-limiting holes (7), a molecular pump group (8), a first dry mechanical pump (9), a gate valve (10), a vacuum gauge (11), a quadrupole mass spectrometer (12), and a measuring chamber (13). In addition, according to the method, an overall leakage rate of the sealed container (5) is measured by using a dynamic method or a static accumulation method and thus a sealing performance of the sealed container is represented; the dynamic method is suitable for large-leakage-rate measurement and the measuring range is associated with a minimum detectable signal and orifice conductance of the quadrupole mass spectrometer (12); and the static accumulation method is suitable for low-helium-leakage-rate measurement and the helium leakage rate of the sealed container (5) is calculated based on measurement on helium partial pressures accumulated in the room by the quadrupole mass spectrometer.

Description

technical field [0001] The invention relates to a vacuum sealing performance measuring device and a measuring method of a sealed container, especially suitable for measuring the total leak rate and the partial pressure leak rate of the sealed container. Background technique [0002] In order to ensure the normal operation of the system under extreme conditions, such as the vacuum environment of semiconductor processing, or the space environment of high vacuum, extremely low temperature, and strong radiation, it needs to be sealed in a sealed container to isolate the system from the extreme environment and ensure the system run smoothly. For example, in the process of semiconductor processing in a vacuum environment, the various electronic systems and electronic components contained in the controller are within 10 -2 Pa~10 2 Working in the low vacuum range of Pa has potential discharge safety hazards; moreover, the electronic systems and electronic components exposed to the...

Claims

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Application Information

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IPC IPC(8): G01M3/20
CPCG01M3/202G01M3/226
Inventor 吴晓斌张罗莎王魁波陈进新罗艳谢婉露周翊王宇崔惠绒
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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