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Macro-micro integrated motion high-precision parallel mechanism device and control method

A technology that integrates motion and mechanism devices. It is used in program-controlled manipulators, manipulators, and manufacturing tools. It can solve problems such as difficult to achieve sub-micron positioning accuracy, eliminate rotary joint clearance, eliminate assembly errors and dimensional errors, and has a compact structure. Effect

Inactive Publication Date: 2017-01-11
SOUTH CHINA UNIV OF TECH
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Problems solved by technology

However, due to the limitation of the working principle, the compliant mechanism usually only has a micron-level working space; the parallel mechanism can easily achieve a working space above the millimeter level, but it is difficult to achieve sub-micron level positioning accuracy

Method used

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  • Macro-micro integrated motion high-precision parallel mechanism device and control method

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Embodiment

[0036] Such as figure 1 As shown, a macro-micro integrated motion high-precision parallel mechanism device includes a mechanical body part and a control part;

[0037] The mechanical body part includes a moving platform 5 and a static platform 1, and the shape of the static platform 1 is a triangle, and the three sides of the triangle are respectively equipped with linear motor-driven branch chains 2, 3, 4 with the same structure, symmetrically distributed, as figure 1 There are three linear motor-driven branch chains in total. The linear motor-driven branch chains are composed of guide rails, sliders and moving pairs formed by linear motors. The guide rails are fixed on the sides of the triangle and are used to adjust the macro motion of the moving platform. motion, the three sides of the static platform are respectively installed with linear grating displacement sensors 6, 7, and 8 for detecting the linear displacement of the slider movement, the measuring head of the linear...

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Abstract

The invention discloses a macro-micro integrated motion high-precision parallel mechanism device and a control method. The macro-micro integrated motion high-precision parallel mechanism device comprises a mechanical body part and a control part. The mechanical body part comprises a fixed platform, a moving platform, linear motor drive branched chains for driving macro motion of the moving platform and micro motion branched chains for driving precise micro motion of the moving platform. The control part comprises a linear motor servo amplifier, a linear precise drive unit servo amplifier, a motion control card and a computer. Linear motor macro motion guarantees the trajectory tracking and motion range, high-precision locating control is achieved through micro motion driven by linear precise drive units, the contradiction of the large stroke and the high precision is solved through macro motion and micro motion integration, and high-precision locating control is achieved in large work space.

Description

technical field [0001] The invention relates to the field of precision positioning, in particular to a macro-micro integrated motion high-precision parallel mechanism device and a control method. Background technique [0002] With the development of science and technology, precision manufacturing, precision measurement and precision positioning technology occupy an increasingly important position in the frontier of scientific research and industrial production. In the field of precision mechanical engineering or material science, it is often necessary to use micro-nano operating systems to study samples. The series mechanism has low precision, large cumulative error and low stiffness, which cannot meet the requirements of high-precision operation. In order to achieve high-precision positioning requirements, the concept of parallel mechanism is proposed. Parallel drive has the characteristics of high rigidity, high load and fast response. At present, there are Delta instit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J9/00B25J13/08
CPCB25J9/0033B25J13/088
Inventor 邱志成张宪民
Owner SOUTH CHINA UNIV OF TECH
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