Evaporation apparatus

A technology of evaporation and evaporation sources, which is applied in the field of evaporation devices, can solve problems such as loose bonding between the mask plate and the substrate, uneven brightness of the finished product, and color mixing, so as to improve the uneven brightness or color mixing of the finished product, and improve the quality of the product. The effect of diversification of rate and arrangement

Inactive Publication Date: 2017-01-18
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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Problems solved by technology

[0006] Aiming at the defects in the prior art, the object of the present invention is to provide an evaporation device, which solves the problem of uneven brightness or color mixing of the finished product due to the loose bonding between the mask and the substrate during the evaporation process, and at the same time does not need to change Existing Manufacturing Process

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Embodiment Construction

[0023] According to the gist of the present invention, the evaporation device includes: an evaporation chamber; an evaporation source, arranged below the evaporation chamber; a magnetic plate, which is polygonal and arranged above the evaporation source, and the magnetic plate The plate includes: a plurality of magnets arranged parallel to each other in the same plane, and the arrangement direction of the plurality of magnets is inclined relative to each periphery of the magnetic plate.

[0024] The technical content of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] Please also see Figure 2 to Figure 6 , which respectively show the structure diagram of the vapor deposition device of the present invention, the structure diagram of the substrate, the cross-sectional structure diagram of the magnetic plate, the longitudinal section structure diagram of the magnetic plate and the magnetic plate fixing ...

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Abstract

The invention relates to an evaporation apparatus. The evaporation apparatus comprises an evaporation cavity; an evaporation source arranged below the evaporation cavity; and a magnetic plate which is in a polygon shape and arranged over the evaporation source, wherein the magnetic plate comprises several blocks of mutually and parallelly arranged magnets in a same plane, and the arrangement direction of the magnets are inclined by relating to each circumference edge of the magnetic plate. The evaporation apparatus solves the problems of nonuniform brightness or color mixing of the finished products due to untight applying of a masking plate and a substrate, and the current manufacture technology is not required for being changed.

Description

technical field [0001] The invention relates to an evaporation device used in the manufacture of organic light-emitting diodes (Organic Light-Emitting Diode, OLED for short). Background technique [0002] An organic light emitting diode is mainly composed of an organic material coating and a substrate (such as a glass substrate). When an electric current passes through, the organic material will emit light. [0003] At present, OLED (Organic Light Emitting Diode) display screen has a large viewing angle and can significantly save power, so it has been widely used in the field of flat panel displays; among them, OLED evaporation technology is the core technology of OLED mass production . [0004] In the OLED evaporation process, the openings of the mask are used to define and form RGB pixels. Therefore, the tightness of the mask and the substrate directly affects the position accuracy of the pixels. Usually, in order to closely adhere the mask plate to the substrate, a magn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
Inventor 翁靖博姜亮何信儒孙钰欣
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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